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- W2303136394 endingPage "86" @default.
- W2303136394 startingPage "79" @default.
- W2303136394 abstract "This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the ph" @default.
- W2303136394 created "2016-06-24" @default.
- W2303136394 creator A5090276233 @default.
- W2303136394 date "2012-03-30" @default.
- W2303136394 modified "2023-09-23" @default.
- W2303136394 title "반도체 포토공정에서 총 가중작업흐름시간을 최소화하기 위한 스케쥴링 방법론에 관한 연구" @default.
- W2303136394 hasPublicationYear "2012" @default.
- W2303136394 type Work @default.
- W2303136394 sameAs 2303136394 @default.
- W2303136394 citedByCount "0" @default.
- W2303136394 crossrefType "journal-article" @default.
- W2303136394 hasAuthorship W2303136394A5090276233 @default.
- W2303136394 hasConcept C105487726 @default.
- W2303136394 hasConcept C111919701 @default.
- W2303136394 hasConcept C117671659 @default.
- W2303136394 hasConcept C119599485 @default.
- W2303136394 hasConcept C127413603 @default.
- W2303136394 hasConcept C136525101 @default.
- W2303136394 hasConcept C142724271 @default.
- W2303136394 hasConcept C160671074 @default.
- W2303136394 hasConcept C171250308 @default.
- W2303136394 hasConcept C185592680 @default.
- W2303136394 hasConcept C192562407 @default.
- W2303136394 hasConcept C199639397 @default.
- W2303136394 hasConcept C204787440 @default.
- W2303136394 hasConcept C2778671685 @default.
- W2303136394 hasConcept C31903555 @default.
- W2303136394 hasConcept C35750839 @default.
- W2303136394 hasConcept C41008148 @default.
- W2303136394 hasConcept C66018809 @default.
- W2303136394 hasConcept C67953723 @default.
- W2303136394 hasConcept C71924100 @default.
- W2303136394 hasConceptScore W2303136394C105487726 @default.
- W2303136394 hasConceptScore W2303136394C111919701 @default.
- W2303136394 hasConceptScore W2303136394C117671659 @default.
- W2303136394 hasConceptScore W2303136394C119599485 @default.
- W2303136394 hasConceptScore W2303136394C127413603 @default.
- W2303136394 hasConceptScore W2303136394C136525101 @default.
- W2303136394 hasConceptScore W2303136394C142724271 @default.
- W2303136394 hasConceptScore W2303136394C160671074 @default.
- W2303136394 hasConceptScore W2303136394C171250308 @default.
- W2303136394 hasConceptScore W2303136394C185592680 @default.
- W2303136394 hasConceptScore W2303136394C192562407 @default.
- W2303136394 hasConceptScore W2303136394C199639397 @default.
- W2303136394 hasConceptScore W2303136394C204787440 @default.
- W2303136394 hasConceptScore W2303136394C2778671685 @default.
- W2303136394 hasConceptScore W2303136394C31903555 @default.
- W2303136394 hasConceptScore W2303136394C35750839 @default.
- W2303136394 hasConceptScore W2303136394C41008148 @default.
- W2303136394 hasConceptScore W2303136394C66018809 @default.
- W2303136394 hasConceptScore W2303136394C67953723 @default.
- W2303136394 hasConceptScore W2303136394C71924100 @default.
- W2303136394 hasIssue "1" @default.
- W2303136394 hasLocation W23031363941 @default.
- W2303136394 hasOpenAccess W2303136394 @default.
- W2303136394 hasPrimaryLocation W23031363941 @default.
- W2303136394 hasVolume "35" @default.
- W2303136394 isParatext "false" @default.
- W2303136394 isRetracted "false" @default.
- W2303136394 magId "2303136394" @default.
- W2303136394 workType "article" @default.