FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2303889319> ?p ?o ?g. }

• W2303889319 endingPage "27361" @default.
• W2303889319 startingPage "27357" @default.
• W2303889319 abstract "Monolayer doping (MLD) presents an alternative method to achieve silicon doping without causing crystal damage, and it has the capability of ultrashallow doping and the doping of nonplanar surfaces. MLD utilizes dopant-containing alkene molecules that form a monolayer on the silicon surface using the well-established hydrosilylation process. Here, we demonstrate that MLD can be extended to high doping levels by designing alkenes with a high content of dopant atoms. Concretely, carborane derivatives, which have 10 B atoms per molecule, were functionalized with an alkene group. MLD using a monolayer of such a derivative yielded up to ten times higher doping levels, as measured by X-ray photoelectron spectroscopy and dynamic secondary mass spectroscopy, compared to an alkene with a single B atom. Sheet resistance measurements showed comparably increased conductivities of the Si substrates. Thermal budget analyses indicate that the doping level can be further optimized by changing the annealing conditions." @default.
• W2303889319 created "2016-06-24" @default.
• W2303889319 creator A5031220825 @default.
• W2303889319 creator A5042048777 @default.
• W2303889319 creator A5043715610 @default.
• W2303889319 creator A5059965487 @default.
• W2303889319 creator A5079541786 @default.
• W2303889319 creator A5079987795 @default.
• W2303889319 creator A5088000194 @default.
• W2303889319 date "2015-12-07" @default.
• W2303889319 modified "2023-10-18" @default.
• W2303889319 title "Boosting the Boron Dopant Level in Monolayer Doping by Carboranes" @default.
• W2303889319 cites W1525247245 @default.
• W2303889319 cites W1584937917 @default.
• W2303889319 cites W1832222207 @default.
• W2303889319 cites W1969877803 @default.
• W2303889319 cites W1976432800 @default.
• W2303889319 cites W1981545888 @default.
• W2303889319 cites W1985376675 @default.
• W2303889319 cites W2004172553 @default.
• W2303889319 cites W2005801419 @default.
• W2303889319 cites W2011488302 @default.
• W2303889319 cites W2014984750 @default.
• W2303889319 cites W2021447193 @default.
• W2303889319 cites W2022096953 @default.
• W2303889319 cites W2044732959 @default.
• W2303889319 cites W2064170020 @default.
• W2303889319 cites W2083431636 @default.
• W2303889319 cites W2093710318 @default.
• W2303889319 cites W2116679363 @default.
• W2303889319 cites W2119382533 @default.
• W2303889319 cites W2167243995 @default.
• W2303889319 cites W2168751351 @default.
• W2303889319 cites W3106036789 @default.
• W2303889319 doi "https://doi.org/10.1021/acsami.5b08952" @default.
• W2303889319 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/26595856" @default.
• W2303889319 hasPublicationYear "2015" @default.
• W2303889319 type Work @default.
• W2303889319 sameAs 2303889319 @default.
• W2303889319 citedByCount "32" @default.
• W2303889319 countsByYear W23038893192016 @default.
• W2303889319 countsByYear W23038893192017 @default.
• W2303889319 countsByYear W23038893192018 @default.
• W2303889319 countsByYear W23038893192019 @default.
• W2303889319 countsByYear W23038893192020 @default.
• W2303889319 countsByYear W23038893192021 @default.
• W2303889319 countsByYear W23038893192022 @default.
• W2303889319 countsByYear W23038893192023 @default.
• W2303889319 crossrefType "journal-article" @default.
• W2303889319 hasAuthorship W2303889319A5031220825 @default.
• W2303889319 hasAuthorship W2303889319A5042048777 @default.
• W2303889319 hasAuthorship W2303889319A5043715610 @default.
• W2303889319 hasAuthorship W2303889319A5059965487 @default.
• W2303889319 hasAuthorship W2303889319A5079541786 @default.
• W2303889319 hasAuthorship W2303889319A5079987795 @default.
• W2303889319 hasAuthorship W2303889319A5088000194 @default.
• W2303889319 hasConcept C127413603 @default.
• W2303889319 hasConcept C161790260 @default.
• W2303889319 hasConcept C171250308 @default.
• W2303889319 hasConcept C175708663 @default.
• W2303889319 hasConcept C178790620 @default.
• W2303889319 hasConcept C185592680 @default.
• W2303889319 hasConcept C191952053 @default.
• W2303889319 hasConcept C192562407 @default.
• W2303889319 hasConcept C2776254738 @default.
• W2303889319 hasConcept C2778421718 @default.
• W2303889319 hasConcept C32909587 @default.
• W2303889319 hasConcept C42360764 @default.
• W2303889319 hasConcept C49040817 @default.
• W2303889319 hasConcept C501308230 @default.
• W2303889319 hasConcept C544956773 @default.
• W2303889319 hasConcept C57863236 @default.
• W2303889319 hasConcept C7070889 @default.
• W2303889319 hasConcept C75473681 @default.
• W2303889319 hasConceptScore W2303889319C127413603 @default.
• W2303889319 hasConceptScore W2303889319C161790260 @default.
• W2303889319 hasConceptScore W2303889319C171250308 @default.
• W2303889319 hasConceptScore W2303889319C175708663 @default.
• W2303889319 hasConceptScore W2303889319C178790620 @default.
• W2303889319 hasConceptScore W2303889319C185592680 @default.
• W2303889319 hasConceptScore W2303889319C191952053 @default.
• W2303889319 hasConceptScore W2303889319C192562407 @default.
• W2303889319 hasConceptScore W2303889319C2776254738 @default.
• W2303889319 hasConceptScore W2303889319C2778421718 @default.
• W2303889319 hasConceptScore W2303889319C32909587 @default.
• W2303889319 hasConceptScore W2303889319C42360764 @default.
• W2303889319 hasConceptScore W2303889319C49040817 @default.
• W2303889319 hasConceptScore W2303889319C501308230 @default.
• W2303889319 hasConceptScore W2303889319C544956773 @default.
• W2303889319 hasConceptScore W2303889319C57863236 @default.
• W2303889319 hasConceptScore W2303889319C7070889 @default.
• W2303889319 hasConceptScore W2303889319C75473681 @default.
• W2303889319 hasFunder F4320321837 @default.
• W2303889319 hasFunder F4320322725 @default.
• W2303889319 hasFunder F4320334857 @default.
• W2303889319 hasIssue "49" @default.
• W2303889319 hasLocation W23038893191 @default.
• W2303889319 hasLocation W23038893192 @default.

• next