Matches in SemOpenAlex for { <https://semopenalex.org/work/W2309323165> ?p ?o ?g. }
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- W2309323165 endingPage "10" @default.
- W2309323165 startingPage "3" @default.
- W2309323165 abstract "The excellent anisotropy of the reactive Ion BeM eTCHING(RIBE) process, its fairly high etch rate and the perfectly smooth etched surface have made it a desirable tool for III-V eletronic and optoeletronic device fabrication. The properties of a microwave excited ion source have been examined, the influence of the various parameters and the etch affect of various gases in Chemical Assisted Ion Beam Etching(CAIBE) have been studied. Application to the fabrication of lasers have demostrated that the initial reluctance to accept such a process for semiconductor device etching was not justified." @default.
- W2309323165 created "2016-06-24" @default.
- W2309323165 creator A5009062953 @default.
- W2309323165 date "2009-10-23" @default.
- W2309323165 modified "2023-09-26" @default.
- W2309323165 title "A Second Look at Reactive Ion-Beam Etching and Chemically-Assited ion-Beam Etching" @default.
- W2309323165 doi "https://doi.org/10.17563/rbav.v11i1.507" @default.
- W2309323165 hasPublicationYear "2009" @default.
- W2309323165 type Work @default.
- W2309323165 sameAs 2309323165 @default.
- W2309323165 citedByCount "0" @default.
- W2309323165 crossrefType "journal-article" @default.
- W2309323165 hasAuthorship W2309323165A5009062953 @default.
- W2309323165 hasConcept C100460472 @default.
- W2309323165 hasConcept C120665830 @default.
- W2309323165 hasConcept C121332964 @default.
- W2309323165 hasConcept C1291036 @default.
- W2309323165 hasConcept C130472188 @default.
- W2309323165 hasConcept C136525101 @default.
- W2309323165 hasConcept C142724271 @default.
- W2309323165 hasConcept C145148216 @default.
- W2309323165 hasConcept C161866238 @default.
- W2309323165 hasConcept C168834538 @default.
- W2309323165 hasConcept C171250308 @default.
- W2309323165 hasConcept C178790620 @default.
- W2309323165 hasConcept C185592680 @default.
- W2309323165 hasConcept C192562407 @default.
- W2309323165 hasConcept C204787440 @default.
- W2309323165 hasConcept C2779227376 @default.
- W2309323165 hasConcept C33220542 @default.
- W2309323165 hasConcept C49040817 @default.
- W2309323165 hasConcept C50774322 @default.
- W2309323165 hasConcept C71924100 @default.
- W2309323165 hasConceptScore W2309323165C100460472 @default.
- W2309323165 hasConceptScore W2309323165C120665830 @default.
- W2309323165 hasConceptScore W2309323165C121332964 @default.
- W2309323165 hasConceptScore W2309323165C1291036 @default.
- W2309323165 hasConceptScore W2309323165C130472188 @default.
- W2309323165 hasConceptScore W2309323165C136525101 @default.
- W2309323165 hasConceptScore W2309323165C142724271 @default.
- W2309323165 hasConceptScore W2309323165C145148216 @default.
- W2309323165 hasConceptScore W2309323165C161866238 @default.
- W2309323165 hasConceptScore W2309323165C168834538 @default.
- W2309323165 hasConceptScore W2309323165C171250308 @default.
- W2309323165 hasConceptScore W2309323165C178790620 @default.
- W2309323165 hasConceptScore W2309323165C185592680 @default.
- W2309323165 hasConceptScore W2309323165C192562407 @default.
- W2309323165 hasConceptScore W2309323165C204787440 @default.
- W2309323165 hasConceptScore W2309323165C2779227376 @default.
- W2309323165 hasConceptScore W2309323165C33220542 @default.
- W2309323165 hasConceptScore W2309323165C49040817 @default.
- W2309323165 hasConceptScore W2309323165C50774322 @default.
- W2309323165 hasConceptScore W2309323165C71924100 @default.
- W2309323165 hasIssue "1" @default.
- W2309323165 hasLocation W23093231651 @default.
- W2309323165 hasOpenAccess W2309323165 @default.
- W2309323165 hasPrimaryLocation W23093231651 @default.
- W2309323165 hasRelatedWork W2009594670 @default.
- W2309323165 hasRelatedWork W2013014352 @default.
- W2309323165 hasRelatedWork W2015495124 @default.
- W2309323165 hasRelatedWork W2045936108 @default.
- W2309323165 hasRelatedWork W2066022477 @default.
- W2309323165 hasRelatedWork W2196790513 @default.
- W2309323165 hasRelatedWork W2289497247 @default.
- W2309323165 hasRelatedWork W2334030456 @default.
- W2309323165 hasRelatedWork W2487304582 @default.
- W2309323165 hasRelatedWork W2730894059 @default.
- W2309323165 hasRelatedWork W3035831946 @default.
- W2309323165 hasRelatedWork W3036061605 @default.
- W2309323165 hasRelatedWork W633852234 @default.
- W2309323165 hasRelatedWork W2513488104 @default.
- W2309323165 hasRelatedWork W2739438828 @default.
- W2309323165 hasRelatedWork W2759312355 @default.
- W2309323165 hasRelatedWork W2774604984 @default.
- W2309323165 hasRelatedWork W2860468859 @default.
- W2309323165 hasRelatedWork W2923346976 @default.
- W2309323165 hasRelatedWork W2925833998 @default.
- W2309323165 hasVolume "11" @default.
- W2309323165 isParatext "false" @default.
- W2309323165 isRetracted "false" @default.
- W2309323165 magId "2309323165" @default.
- W2309323165 workType "article" @default.