FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2311931922> ?p ?o ?g. }

• W2311931922 endingPage "016503" @default.
• W2311931922 startingPage "016503" @default.
• W2311931922 abstract "Abstract Our original hybrid method combining tight-binding quantum chemical and classical molecular dynamics was first applied to the low-energy doping process of boron into a silicon substrate, which has a depth of more than 10 nm that is needed to evaluate an ultrashallow junction position. Tight-binding quantum chemical molecular dynamics calculation was used for an injected boron atom and surrounding silicon atoms within a sphere with a radius of 0.5 nm centered at the boron atom. This method is advantageous in treating the many-body collision effect and electron–electron interaction, which are more important in low-energy doping, compared with the Monte Carlo method with binary collision approximation. A comparison with a plasma doping experiment was also carried out. The junction positions were 6.2 nm for boron doping at an initial kinetic energy of 200 eV in the simulation results and 6.4 nm for 200 eV in the experimental results. Good agreement between simulation and experimental results indicates that our hybrid molecular dynamics method is applicable to doping profile prediction in a silicon structure with a depth of more than 10 nm that is needed to evaluate ultrashallow junction formation." @default.
• W2311931922 created "2016-06-24" @default.
• W2311931922 creator A5038260027 @default.
• W2311931922 creator A5056260263 @default.
• W2311931922 date "2015-12-17" @default.
• W2311931922 modified "2023-09-28" @default.
• W2311931922 title "Prediction of low-energy boron doping profile for ultrashallow junction formation by hybrid molecular dynamics method" @default.
• W2311931922 cites W1974039035 @default.
• W2311931922 cites W1980398462 @default.
• W2311931922 cites W1983365479 @default.
• W2311931922 cites W1984402738 @default.
• W2311931922 cites W1996524269 @default.
• W2311931922 cites W2005722293 @default.
• W2311931922 cites W2013627756 @default.
• W2311931922 cites W2014040515 @default.
• W2311931922 cites W2015144097 @default.
• W2311931922 cites W2018659760 @default.
• W2311931922 cites W2035304603 @default.
• W2311931922 cites W2037782625 @default.
• W2311931922 cites W2050261096 @default.
• W2311931922 cites W2051252269 @default.
• W2311931922 cites W2072372908 @default.
• W2311931922 cites W2119619117 @default.
• W2311931922 cites W2161516429 @default.
• W2311931922 cites W2166234139 @default.
• W2311931922 cites W4252847335 @default.
• W2311931922 doi "https://doi.org/10.7567/jjap.55.016503" @default.
• W2311931922 hasPublicationYear "2015" @default.
• W2311931922 type Work @default.
• W2311931922 sameAs 2311931922 @default.
• W2311931922 citedByCount "0" @default.
• W2311931922 crossrefType "journal-article" @default.
• W2311931922 hasAuthorship W2311931922A5038260027 @default.
• W2311931922 hasAuthorship W2311931922A5056260263 @default.
• W2311931922 hasConcept C111368507 @default.
• W2311931922 hasConcept C121332964 @default.
• W2311931922 hasConcept C127313418 @default.
• W2311931922 hasConcept C135889238 @default.
• W2311931922 hasConcept C147597530 @default.
• W2311931922 hasConcept C149635348 @default.
• W2311931922 hasConcept C159467904 @default.
• W2311931922 hasConcept C178635117 @default.
• W2311931922 hasConcept C178790620 @default.
• W2311931922 hasConcept C184779094 @default.
• W2311931922 hasConcept C185592680 @default.
• W2311931922 hasConcept C192562407 @default.
• W2311931922 hasConcept C2777289219 @default.
• W2311931922 hasConcept C38652104 @default.
• W2311931922 hasConcept C41008148 @default.
• W2311931922 hasConcept C41999313 @default.
• W2311931922 hasConcept C49040817 @default.
• W2311931922 hasConcept C501308230 @default.
• W2311931922 hasConcept C544956773 @default.
• W2311931922 hasConcept C57863236 @default.
• W2311931922 hasConcept C58312451 @default.
• W2311931922 hasConcept C59593255 @default.
• W2311931922 hasConcept C62520636 @default.
• W2311931922 hasConceptScore W2311931922C111368507 @default.
• W2311931922 hasConceptScore W2311931922C121332964 @default.
• W2311931922 hasConceptScore W2311931922C127313418 @default.
• W2311931922 hasConceptScore W2311931922C135889238 @default.
• W2311931922 hasConceptScore W2311931922C147597530 @default.
• W2311931922 hasConceptScore W2311931922C149635348 @default.
• W2311931922 hasConceptScore W2311931922C159467904 @default.
• W2311931922 hasConceptScore W2311931922C178635117 @default.
• W2311931922 hasConceptScore W2311931922C178790620 @default.
• W2311931922 hasConceptScore W2311931922C184779094 @default.
• W2311931922 hasConceptScore W2311931922C185592680 @default.
• W2311931922 hasConceptScore W2311931922C192562407 @default.
• W2311931922 hasConceptScore W2311931922C2777289219 @default.
• W2311931922 hasConceptScore W2311931922C38652104 @default.
• W2311931922 hasConceptScore W2311931922C41008148 @default.
• W2311931922 hasConceptScore W2311931922C41999313 @default.
• W2311931922 hasConceptScore W2311931922C49040817 @default.
• W2311931922 hasConceptScore W2311931922C501308230 @default.
• W2311931922 hasConceptScore W2311931922C544956773 @default.
• W2311931922 hasConceptScore W2311931922C57863236 @default.
• W2311931922 hasConceptScore W2311931922C58312451 @default.
• W2311931922 hasConceptScore W2311931922C59593255 @default.
• W2311931922 hasConceptScore W2311931922C62520636 @default.
• W2311931922 hasIssue "1" @default.
• W2311931922 hasLocation W23119319221 @default.
• W2311931922 hasOpenAccess W2311931922 @default.
• W2311931922 hasPrimaryLocation W23119319221 @default.
• W2311931922 hasRelatedWork W1228008564 @default.
• W2311931922 hasRelatedWork W1981821366 @default.
• W2311931922 hasRelatedWork W1993750249 @default.
• W2311931922 hasRelatedWork W2033669323 @default.
• W2311931922 hasRelatedWork W2039043163 @default.
• W2311931922 hasRelatedWork W2073344850 @default.
• W2311931922 hasRelatedWork W2074953504 @default.
• W2311931922 hasRelatedWork W2375638766 @default.
• W2311931922 hasRelatedWork W2086742598 @default.
• W2311931922 hasRelatedWork W2098052754 @default.
• W2311931922 hasVolume "55" @default.
• W2311931922 isParatext "false" @default.
• W2311931922 isRetracted "false" @default.
• W2311931922 magId "2311931922" @default.

• next