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- W2313155280 abstract "Thermal decomposition of the coordination compounds Rf3-nMenGaAsEt3 (Rf = C6F5; n = 0, 2) in a CVD reactor has been investigated under helium and hydrogen atmosphere by a quadrupole mass analyzer. At 600°C, hydrogen facilitates the Rf elimination forming C6F5H but under inert atmosphere, decomposition of these cyclic groups generates HC≡CF and stable gallium flouride entities which prevent, in the case of Rf3GaAsEt3, the growth of the layer. The ethyl elimination mechanism is a β elimination for RfMe2GaAsEt3 in helium, hydrogenolysis and homolytic fission followed by disproportionation of Et radical for RfMe2GaAsEt3 in hydrogen. The reaction mechanism becomes complicated for Rf3GaAsEt3 in helium. The electroattractive Rf group stabilizes the donor-acceptor Ga-As bond as this is required for adducts used as a single source but, its use as ligand in organometallic precursor for GaAs epitaxy must be limited accordingly to its low thermal stability." @default.
- W2313155280 created "2016-06-24" @default.
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- W2313155280 date "1988-08-01" @default.
- W2313155280 modified "2023-09-27" @default.
- W2313155280 title "Mass spectrometric study of the pyrolysis of organometallic precursors usable in GaAs vapor phase epitaxy" @default.
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- W2313155280 doi "https://doi.org/10.1016/0022-0248(88)90372-7" @default.
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