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- W2313825172 abstract "This paper describes.a measurement of surface flatness along a circle with no standard. For the measurement, distances of the space between two unknown surfaces located almost in parallel are measured along a circle. One of the surfaces is rotated around the center of the circle and the distances are measured again. This procedure is repeated many times. The profiles of two surfaces along a circle are calculated from these data. Validity of this measuring principle was proved by computer simulations and simple measuring experiments in the former paper. In this study the principle is applied to measurement using a Fizeau interferometer with He-Ne laser. For the purpose, a high precision mirror and a metal-coated glass are used for the upper and lower reflection surfaces respectively. Their profiles are unknown. The distances between two surfaces are obtained by the interference fringes. Fourier transform method is used to obtain the distances smaller than one fringe. Two profiles are calculated from the data. Profile measurements are carried out four times using four different metal-coated glass plates as the lower surface and a precise mirror as the upper surface. The measured profiles of the precise mirror obtained by these procedures agree well with a deviation of about 2nm." @default.
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- W2313825172 date "1999-01-01" @default.
- W2313825172 modified "2023-09-25" @default.
- W2313825172 title "Profile Measurement with no Standard. Measuring Experiment of Flatness along a Circle using a Fizeau-Interferometer." @default.
- W2313825172 doi "https://doi.org/10.2493/jjspe.65.300" @default.
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