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• W2314412902 abstract "We combine conventional planar semiconductor processing with gray-scale topography created by digital projection photochemical etching to fabricate adiabatic waveguide mode converters. Applications include efficient coupling to fiber or between planes of multi-layer photonic integrated circuits." @default.
• W2314412902 created "2016-06-24" @default.
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• W2314412902 date "2015-01-01" @default.
• W2314412902 modified "2023-09-27" @default.
• W2314412902 title "Vertically Tapered Adiabatic Waveguide Mode Converters Fabricated with Digital Projection Photochemical Etching" @default.
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• W2314412902 doi "https://doi.org/10.1364/fio.2015.fth4f.4" @default.
• W2314412902 hasPublicationYear "2015" @default.
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