Matches in SemOpenAlex for { <https://semopenalex.org/work/W2314777769> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2314777769 endingPage "1011" @default.
- W2314777769 startingPage "1007" @default.
- W2314777769 abstract "A determination was made of the conditions favorable to the deposition and diffusion of Si3N4 on SKD11 steel substrates by means of an inductively coupled, externally heated plasma discharge and a push-pull Hartley RF (13.56-MHz) oscillator using a triode and having a maximum output of 70W was disigned. The reactive gases NH3 and SiN4 were diluted with Ar to a prescribed concentration. Test pieces of SKD11 measuring 5×5×0.5mm were prepared, thier surfaced were polished using diamond paste, and the Si3N4 was deposited onto the surface.By means of experiments based on a method using orthogonal table L27, it was found that the optimum distance between the test pieces and the oscillator electrode was 25cm, and the optimum ratio between NH3 and SiH4 was 1:2.5 at 1073K. The relationship between the distance between the test pieces and the oscillator electrode and the reaction temperature was 5% significant for the thickness of the diffusion layer.Investigation of the apparent activation enerty of the growth of the diffusion layer of Si3N4 yielded a value of 78.7kJ/mol at 1023K-1073K." @default.
- W2314777769 created "2016-06-24" @default.
- W2314777769 creator A5032677862 @default.
- W2314777769 creator A5051513426 @default.
- W2314777769 creator A5062581239 @default.
- W2314777769 date "1989-01-01" @default.
- W2314777769 modified "2023-10-06" @default.
- W2314777769 title "Deposition and diffusion of Si3N4 on steel substrate by plasma discharge." @default.
- W2314777769 doi "https://doi.org/10.4139/sfj.40.1007" @default.
- W2314777769 hasPublicationYear "1989" @default.
- W2314777769 type Work @default.
- W2314777769 sameAs 2314777769 @default.
- W2314777769 citedByCount "0" @default.
- W2314777769 crossrefType "journal-article" @default.
- W2314777769 hasAuthorship W2314777769A5032677862 @default.
- W2314777769 hasAuthorship W2314777769A5051513426 @default.
- W2314777769 hasAuthorship W2314777769A5062581239 @default.
- W2314777769 hasBestOaLocation W23147777691 @default.
- W2314777769 hasConcept C111368507 @default.
- W2314777769 hasConcept C113196181 @default.
- W2314777769 hasConcept C119599485 @default.
- W2314777769 hasConcept C121332964 @default.
- W2314777769 hasConcept C123544296 @default.
- W2314777769 hasConcept C127313418 @default.
- W2314777769 hasConcept C127413603 @default.
- W2314777769 hasConcept C147789679 @default.
- W2314777769 hasConcept C151730666 @default.
- W2314777769 hasConcept C159985019 @default.
- W2314777769 hasConcept C165801399 @default.
- W2314777769 hasConcept C17525397 @default.
- W2314777769 hasConcept C185592680 @default.
- W2314777769 hasConcept C191897082 @default.
- W2314777769 hasConcept C192562407 @default.
- W2314777769 hasConcept C2777289219 @default.
- W2314777769 hasConcept C2779227376 @default.
- W2314777769 hasConcept C2816523 @default.
- W2314777769 hasConcept C38347018 @default.
- W2314777769 hasConcept C43617362 @default.
- W2314777769 hasConcept C49040817 @default.
- W2314777769 hasConcept C52192207 @default.
- W2314777769 hasConcept C57410435 @default.
- W2314777769 hasConcept C62520636 @default.
- W2314777769 hasConcept C64297162 @default.
- W2314777769 hasConcept C65177555 @default.
- W2314777769 hasConcept C69357855 @default.
- W2314777769 hasConcept C82706917 @default.
- W2314777769 hasConcept C86803240 @default.
- W2314777769 hasConcept C97355855 @default.
- W2314777769 hasConceptScore W2314777769C111368507 @default.
- W2314777769 hasConceptScore W2314777769C113196181 @default.
- W2314777769 hasConceptScore W2314777769C119599485 @default.
- W2314777769 hasConceptScore W2314777769C121332964 @default.
- W2314777769 hasConceptScore W2314777769C123544296 @default.
- W2314777769 hasConceptScore W2314777769C127313418 @default.
- W2314777769 hasConceptScore W2314777769C127413603 @default.
- W2314777769 hasConceptScore W2314777769C147789679 @default.
- W2314777769 hasConceptScore W2314777769C151730666 @default.
- W2314777769 hasConceptScore W2314777769C159985019 @default.
- W2314777769 hasConceptScore W2314777769C165801399 @default.
- W2314777769 hasConceptScore W2314777769C17525397 @default.
- W2314777769 hasConceptScore W2314777769C185592680 @default.
- W2314777769 hasConceptScore W2314777769C191897082 @default.
- W2314777769 hasConceptScore W2314777769C192562407 @default.
- W2314777769 hasConceptScore W2314777769C2777289219 @default.
- W2314777769 hasConceptScore W2314777769C2779227376 @default.
- W2314777769 hasConceptScore W2314777769C2816523 @default.
- W2314777769 hasConceptScore W2314777769C38347018 @default.
- W2314777769 hasConceptScore W2314777769C43617362 @default.
- W2314777769 hasConceptScore W2314777769C49040817 @default.
- W2314777769 hasConceptScore W2314777769C52192207 @default.
- W2314777769 hasConceptScore W2314777769C57410435 @default.
- W2314777769 hasConceptScore W2314777769C62520636 @default.
- W2314777769 hasConceptScore W2314777769C64297162 @default.
- W2314777769 hasConceptScore W2314777769C65177555 @default.
- W2314777769 hasConceptScore W2314777769C69357855 @default.
- W2314777769 hasConceptScore W2314777769C82706917 @default.
- W2314777769 hasConceptScore W2314777769C86803240 @default.
- W2314777769 hasConceptScore W2314777769C97355855 @default.
- W2314777769 hasIssue "9" @default.
- W2314777769 hasLocation W23147777691 @default.
- W2314777769 hasOpenAccess W2314777769 @default.
- W2314777769 hasPrimaryLocation W23147777691 @default.
- W2314777769 hasRelatedWork W2033471823 @default.
- W2314777769 hasRelatedWork W2047992764 @default.
- W2314777769 hasRelatedWork W2141953754 @default.
- W2314777769 hasRelatedWork W2334316275 @default.
- W2314777769 hasRelatedWork W2347430380 @default.
- W2314777769 hasRelatedWork W2349809291 @default.
- W2314777769 hasRelatedWork W2356201124 @default.
- W2314777769 hasRelatedWork W3192124688 @default.
- W2314777769 hasRelatedWork W4309636947 @default.
- W2314777769 hasRelatedWork W2152946510 @default.
- W2314777769 hasVolume "40" @default.
- W2314777769 isParatext "false" @default.
- W2314777769 isRetracted "false" @default.
- W2314777769 magId "2314777769" @default.
- W2314777769 workType "article" @default.