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• W2314901663 abstract "A simple analytical model for the planar radio-frequency (rf) sheath in capacitive discharges is developed that is based on the assumptions of a step profile for the electron front, charge exchange collisions with constant cross sections, negligible ionization within the sheath, and negligible ion dynamics. The continuity, momentum conservation, and Poisson equations are combined in a single integro-differential equation for the square of the ion drift velocity, the so called sheath equation. Starting from the kinetic Boltzmann equation, special attention is paid to the derivation and the validity of the approximate fluid equation for momentum balance. The integrals in the sheath equation appear in the screening function which considers the relative contribution of the temporal mean of the electron density to the space charge in the sheath. It is shown that the screening function is quite insensitive to variations of the effective sheath parameters. The two parameters defining the solution are the ratios of the maximum sheath extension to the ion mean free path and the Debye length, respectively. A simple general analytic expression for the screening function is introduced. By means of this expression approximate analytical solutions are obtained for the collisionless as well as the highly collisional case that compare well with the exact numerical solution. A simple transition formula allows application to all degrees of collisionality. In addition, the solutions are used to calculate all static and dynamic quantities of the sheath, e.g., the ion density, fields, and currents. Further, the rf Child-Langmuir laws for the collisionless as well as the collisional case are derived. An essential part of the model is the a priori knowledge of the wave form of the sheath voltage. This wave form is derived on the basis of a cubic charge-voltage relation for individual sheaths, considering both sheaths and the self-consistent self-bias in a discharge with arbitrary symmetry. The externally applied rf voltage is assumed to be sinusoidal, although the model can be extended to arbitrary wave forms, e.g., for dual-frequency discharges. The model calculates explicitly the cubic correction parameter in the charge-voltage relation for the case of highly asymmetric discharges. It is shown that the cubic correction is generally moderate but more pronounced in the collisionless case. The analytical results are compared to experimental data from the literature obtained by laser electric field measurements of the mean and dynamic fields in the capacitive sheath for various gases and pressures. Very good agreement is found throughout." @default.
• W2314901663 created "2016-06-24" @default.
• W2314901663 creator A5005908187 @default.
• W2314901663 date "2013-12-03" @default.
• W2314901663 modified "2023-09-27" @default.
• W2314901663 title "Analytical model for the radio-frequency sheath" @default.
• W2314901663 cites W1538357084 @default.
• W2314901663 cites W1966995630 @default.
• W2314901663 cites W1967497913 @default.
• W2314901663 cites W1978330229 @default.
• W2314901663 cites W1978578341 @default.
• W2314901663 cites W1980807895 @default.
• W2314901663 cites W1981948903 @default.
• W2314901663 cites W1986710888 @default.
• W2314901663 cites W1987600079 @default.
• W2314901663 cites W1987856106 @default.
• W2314901663 cites W1988516171 @default.
• W2314901663 cites W1989791182 @default.
• W2314901663 cites W1989815886 @default.
• W2314901663 cites W1990396052 @default.
• W2314901663 cites W1991667961 @default.
• W2314901663 cites W1995206118 @default.
• W2314901663 cites W1998448686 @default.
• W2314901663 cites W2008788915 @default.
• W2314901663 cites W2011804346 @default.
• W2314901663 cites W2012198682 @default.
• W2314901663 cites W2014182649 @default.
• W2314901663 cites W2016406071 @default.
• W2314901663 cites W2020045108 @default.
• W2314901663 cites W2023130906 @default.
• W2314901663 cites W2028636997 @default.
• W2314901663 cites W2031133529 @default.
• W2314901663 cites W2032477939 @default.
• W2314901663 cites W2033886742 @default.
• W2314901663 cites W2035060057 @default.
• W2314901663 cites W2037377389 @default.
• W2314901663 cites W2037498995 @default.
• W2314901663 cites W2037717684 @default.
• W2314901663 cites W2038162632 @default.
• W2314901663 cites W2038522088 @default.
• W2314901663 cites W2046640010 @default.
• W2314901663 cites W2047966721 @default.
• W2314901663 cites W2051544154 @default.
• W2314901663 cites W2052038908 @default.
• W2314901663 cites W2053365844 @default.
• W2314901663 cites W2054156844 @default.
• W2314901663 cites W2055549060 @default.
• W2314901663 cites W2057938437 @default.
• W2314901663 cites W2060853353 @default.
• W2314901663 cites W2061477798 @default.
• W2314901663 cites W2062565902 @default.
• W2314901663 cites W2065396587 @default.
• W2314901663 cites W2067467475 @default.
• W2314901663 cites W2067566148 @default.
• W2314901663 cites W2070815041 @default.
• W2314901663 cites W2070997554 @default.
• W2314901663 cites W2071257383 @default.
• W2314901663 cites W2072206571 @default.
• W2314901663 cites W2074563675 @default.
• W2314901663 cites W2074661492 @default.
• W2314901663 cites W2078023751 @default.
• W2314901663 cites W2080461130 @default.
• W2314901663 cites W2082693291 @default.
• W2314901663 cites W2082818799 @default.
• W2314901663 cites W2084876109 @default.
• W2314901663 cites W2095440262 @default.
• W2314901663 cites W2106582005 @default.
• W2314901663 cites W2112552636 @default.
• W2314901663 cites W2112838458 @default.
• W2314901663 cites W2115625232 @default.
• W2314901663 cites W2137567778 @default.
• W2314901663 cites W2147018641 @default.
• W2314901663 cites W2158196597 @default.
• W2314901663 cites W2164335666 @default.
• W2314901663 cites W2171411425 @default.
• W2314901663 cites W2493880907 @default.
• W2314901663 cites W3100759817 @default.
• W2314901663 cites W31133029 @default.
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• W2314901663 doi "https://doi.org/10.1103/physreve.88.063101" @default.
• W2314901663 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24483571" @default.
• W2314901663 hasPublicationYear "2013" @default.
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