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- W2315156982 abstract "A design procedure of ultra precise linear guideway is discussed with respect to its desired material property first and it was clarified that alumina ceramics suit for ultra precise applications because of its high specific rigidity and possibility to finish precisely by lapping operations. Secondary, the surface-restricted-type air bearing is adopted in order to make the bearing stiffness higher with the smaller bearing clearance. A prototype slider was made, the performances of which does not coinside so well with the theory which was reported previously. But the prototype had shown that its stiffness becomes high, up to about 200 N/μm with the bearing area of 200×120 mm. With the help of present report, it is possible to design more accurate and rigid linear guideway which may be applicable to the various engineering fields." @default.
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- W2315156982 date "1989-01-01" @default.
- W2315156982 modified "2023-10-02" @default.
- W2315156982 title "On the design of ultra-precise aerostatic linear guideway." @default.
- W2315156982 doi "https://doi.org/10.2493/jjspe.55.908" @default.
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