Matches in SemOpenAlex for { <https://semopenalex.org/work/W2315692236> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2315692236 endingPage "419" @default.
- W2315692236 startingPage "413" @default.
- W2315692236 abstract "A new monolithic device technology for micromachines has been developed. This device consists of a flexible film and thinned integrated circuits. The fabrication process is compatible with high performance CMOS devices. The flexible film includes high density wires and other electric functions in several micrometers thick. The integrated circuits are thinned by electrochemical etching to less than 20μm thick. This device is useful for integration and size reduction of electric components for micromachines. We have fabricated the monolithic devices and investigated the characteristics." @default.
- W2315692236 created "2016-06-24" @default.
- W2315692236 creator A5023956456 @default.
- W2315692236 creator A5046689408 @default.
- W2315692236 creator A5048932702 @default.
- W2315692236 creator A5054146834 @default.
- W2315692236 creator A5062011555 @default.
- W2315692236 date "1997-01-01" @default.
- W2315692236 modified "2023-09-26" @default.
- W2315692236 title "Monolithic Fabrication of Flexible Film and Thinned Integrated Circuits" @default.
- W2315692236 cites W1967991634 @default.
- W2315692236 cites W1992148308 @default.
- W2315692236 cites W2009634812 @default.
- W2315692236 cites W2023022958 @default.
- W2315692236 cites W2026351009 @default.
- W2315692236 cites W2034505925 @default.
- W2315692236 cites W2039038818 @default.
- W2315692236 cites W2081523598 @default.
- W2315692236 doi "https://doi.org/10.1541/ieejsmas.117.413" @default.
- W2315692236 hasPublicationYear "1997" @default.
- W2315692236 type Work @default.
- W2315692236 sameAs 2315692236 @default.
- W2315692236 citedByCount "2" @default.
- W2315692236 crossrefType "journal-article" @default.
- W2315692236 hasAuthorship W2315692236A5023956456 @default.
- W2315692236 hasAuthorship W2315692236A5046689408 @default.
- W2315692236 hasAuthorship W2315692236A5048932702 @default.
- W2315692236 hasAuthorship W2315692236A5054146834 @default.
- W2315692236 hasAuthorship W2315692236A5062011555 @default.
- W2315692236 hasBestOaLocation W23156922361 @default.
- W2315692236 hasConcept C100460472 @default.
- W2315692236 hasConcept C119599485 @default.
- W2315692236 hasConcept C127413603 @default.
- W2315692236 hasConcept C134146338 @default.
- W2315692236 hasConcept C136525101 @default.
- W2315692236 hasConcept C142724271 @default.
- W2315692236 hasConcept C171250308 @default.
- W2315692236 hasConcept C192562407 @default.
- W2315692236 hasConcept C204787440 @default.
- W2315692236 hasConcept C24326235 @default.
- W2315692236 hasConcept C2779227376 @default.
- W2315692236 hasConcept C46362747 @default.
- W2315692236 hasConcept C49040817 @default.
- W2315692236 hasConcept C530198007 @default.
- W2315692236 hasConcept C71924100 @default.
- W2315692236 hasConceptScore W2315692236C100460472 @default.
- W2315692236 hasConceptScore W2315692236C119599485 @default.
- W2315692236 hasConceptScore W2315692236C127413603 @default.
- W2315692236 hasConceptScore W2315692236C134146338 @default.
- W2315692236 hasConceptScore W2315692236C136525101 @default.
- W2315692236 hasConceptScore W2315692236C142724271 @default.
- W2315692236 hasConceptScore W2315692236C171250308 @default.
- W2315692236 hasConceptScore W2315692236C192562407 @default.
- W2315692236 hasConceptScore W2315692236C204787440 @default.
- W2315692236 hasConceptScore W2315692236C24326235 @default.
- W2315692236 hasConceptScore W2315692236C2779227376 @default.
- W2315692236 hasConceptScore W2315692236C46362747 @default.
- W2315692236 hasConceptScore W2315692236C49040817 @default.
- W2315692236 hasConceptScore W2315692236C530198007 @default.
- W2315692236 hasConceptScore W2315692236C71924100 @default.
- W2315692236 hasIssue "8" @default.
- W2315692236 hasLocation W23156922361 @default.
- W2315692236 hasOpenAccess W2315692236 @default.
- W2315692236 hasPrimaryLocation W23156922361 @default.
- W2315692236 hasRelatedWork W1599364120 @default.
- W2315692236 hasRelatedWork W1976724132 @default.
- W2315692236 hasRelatedWork W2121226886 @default.
- W2315692236 hasRelatedWork W2122214001 @default.
- W2315692236 hasRelatedWork W2150799356 @default.
- W2315692236 hasRelatedWork W2381855323 @default.
- W2315692236 hasRelatedWork W2383748630 @default.
- W2315692236 hasRelatedWork W2542134002 @default.
- W2315692236 hasRelatedWork W3178414657 @default.
- W2315692236 hasRelatedWork W2484520058 @default.
- W2315692236 hasVolume "117" @default.
- W2315692236 isParatext "false" @default.
- W2315692236 isRetracted "false" @default.
- W2315692236 magId "2315692236" @default.
- W2315692236 workType "article" @default.