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• W2316055993 endingPage "04EF12" @default.
• W2316055993 startingPage "04EF12" @default.
• W2316055993 abstract "Abstract In this article, the authors propose a high-voltage photovoltaic (PV) cell array integrating discharging phototransistors for the fast driving of an electrostatic MEMS actuator by light with wavelength modulation. A PV cell array and phototransistors are connected in parallel and colored with green and red lacquer, respectively. This circuit repeats the charge and discharge of a MEMS actuator by being illuminated with light whose color periodically changes between red and green. This method requires only a small additional area and can discharge the actuator at an arbitrary timing. The authors extract the parameters of the circuit and also demonstrate the dynamic driving of a MEMS comb-drive actuator." @default.
• W2316055993 created "2016-06-24" @default.
• W2316055993 creator A5025368684 @default.
• W2316055993 creator A5038609514 @default.
• W2316055993 creator A5083504396 @default.
• W2316055993 date "2016-03-22" @default.
• W2316055993 modified "2023-10-02" @default.
• W2316055993 title "Discharging-phototransistor-integrated high-voltage Si photovoltaic cells for fast driving demonstration of an electrostatic MEMS actuator by wavelength modulation" @default.
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• W2316055993 doi "https://doi.org/10.7567/jjap.55.04ef12" @default.
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