Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316088956> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2316088956 endingPage "045009" @default.
- W2316088956 startingPage "045009" @default.
- W2316088956 abstract "This paper presents fully sealed absolute capacitive pressure sensors for high-pressure applications in hydraulic environments. The sensors have a o100 μm diaphragm and a nominal interelectrode gap of 3 μm. The interiors of the cavities are electrically isolated, allowing the sensors to operate at the high end of the pressure range with the center of the diaphragm in contact with the substrate beneath it. The sensors are monolithically fabricated using a combination of surface micromachining and through-wafer isolated bulk-silicon lead transfer for backside contacts. This structure allows the device footprints to be reduced to about 150 × 150 μm2, and simplifies system integration. Fabricated sensors with diaphragm thicknesses of 3 μm (C100t3) and 5 μm (C100t5) are tested in an oil environment at pressures up to 20 MPa and 50 MPa, respectively. The average sensitivities are 7200 ppm MPa−1 (3.1 fF MPa−1) for C100t3, and 3400 ppm MPa−1 (1.6 fF MPa−1) for C100t5 in the non-contact mode. In the contact mode, the average sensitivities are 9900 ppm MPa−1 (5.3 fF MPa−1) for C100t3, and 3100 ppm MPa−1 (1.6 fF MPa−1) for C100t5. A multiphysics finite element analysis approach that accommodates contact mode simulations is also presented." @default.
- W2316088956 created "2016-06-24" @default.
- W2316088956 creator A5016991190 @default.
- W2316088956 creator A5057998370 @default.
- W2316088956 date "2016-03-07" @default.
- W2316088956 modified "2023-09-25" @default.
- W2316088956 title "A 100<i>μ</i>m diameter capacitive pressure sensor with 50 MPa dynamic range" @default.
- W2316088956 cites W1882562541 @default.
- W2316088956 cites W1963484171 @default.
- W2316088956 cites W1965469072 @default.
- W2316088956 cites W1966069796 @default.
- W2316088956 cites W1971852692 @default.
- W2316088956 cites W1971966678 @default.
- W2316088956 cites W1983454040 @default.
- W2316088956 cites W1993708952 @default.
- W2316088956 cites W1995409867 @default.
- W2316088956 cites W2003797793 @default.
- W2316088956 cites W2004885986 @default.
- W2316088956 cites W2013896105 @default.
- W2316088956 cites W2041652448 @default.
- W2316088956 cites W2051791908 @default.
- W2316088956 cites W2061954396 @default.
- W2316088956 cites W2069970537 @default.
- W2316088956 cites W2079014682 @default.
- W2316088956 cites W2082784368 @default.
- W2316088956 cites W2092139036 @default.
- W2316088956 cites W2093743178 @default.
- W2316088956 cites W2099548157 @default.
- W2316088956 cites W2127759363 @default.
- W2316088956 cites W2131155030 @default.
- W2316088956 cites W2137775529 @default.
- W2316088956 cites W2150143516 @default.
- W2316088956 cites W2156007296 @default.
- W2316088956 cites W2157972301 @default.
- W2316088956 cites W2310339052 @default.
- W2316088956 doi "https://doi.org/10.1088/0960-1317/26/4/045009" @default.
- W2316088956 hasPublicationYear "2016" @default.
- W2316088956 type Work @default.
- W2316088956 sameAs 2316088956 @default.
- W2316088956 citedByCount "17" @default.
- W2316088956 countsByYear W23160889562017 @default.
- W2316088956 countsByYear W23160889562018 @default.
- W2316088956 countsByYear W23160889562019 @default.
- W2316088956 countsByYear W23160889562020 @default.
- W2316088956 countsByYear W23160889562021 @default.
- W2316088956 countsByYear W23160889562022 @default.
- W2316088956 countsByYear W23160889562023 @default.
- W2316088956 crossrefType "journal-article" @default.
- W2316088956 hasAuthorship W2316088956A5016991190 @default.
- W2316088956 hasAuthorship W2316088956A5057998370 @default.
- W2316088956 hasConcept C119599485 @default.
- W2316088956 hasConcept C121332964 @default.
- W2316088956 hasConcept C127413603 @default.
- W2316088956 hasConcept C159985019 @default.
- W2316088956 hasConcept C192562407 @default.
- W2316088956 hasConcept C204323151 @default.
- W2316088956 hasConcept C206755178 @default.
- W2316088956 hasConcept C24326235 @default.
- W2316088956 hasConcept C24890656 @default.
- W2316088956 hasConcept C41325743 @default.
- W2316088956 hasConcept C78519656 @default.
- W2316088956 hasConcept C87133666 @default.
- W2316088956 hasConceptScore W2316088956C119599485 @default.
- W2316088956 hasConceptScore W2316088956C121332964 @default.
- W2316088956 hasConceptScore W2316088956C127413603 @default.
- W2316088956 hasConceptScore W2316088956C159985019 @default.
- W2316088956 hasConceptScore W2316088956C192562407 @default.
- W2316088956 hasConceptScore W2316088956C204323151 @default.
- W2316088956 hasConceptScore W2316088956C206755178 @default.
- W2316088956 hasConceptScore W2316088956C24326235 @default.
- W2316088956 hasConceptScore W2316088956C24890656 @default.
- W2316088956 hasConceptScore W2316088956C41325743 @default.
- W2316088956 hasConceptScore W2316088956C78519656 @default.
- W2316088956 hasConceptScore W2316088956C87133666 @default.
- W2316088956 hasIssue "4" @default.
- W2316088956 hasLocation W23160889561 @default.
- W2316088956 hasOpenAccess W2316088956 @default.
- W2316088956 hasPrimaryLocation W23160889561 @default.
- W2316088956 hasRelatedWork W2082293200 @default.
- W2316088956 hasRelatedWork W2102990701 @default.
- W2316088956 hasRelatedWork W2137307547 @default.
- W2316088956 hasRelatedWork W2380293314 @default.
- W2316088956 hasRelatedWork W2943188944 @default.
- W2316088956 hasRelatedWork W3008690834 @default.
- W2316088956 hasRelatedWork W3040287416 @default.
- W2316088956 hasRelatedWork W3082440218 @default.
- W2316088956 hasRelatedWork W4285802202 @default.
- W2316088956 hasRelatedWork W784118787 @default.
- W2316088956 hasVolume "26" @default.
- W2316088956 isParatext "false" @default.
- W2316088956 isRetracted "false" @default.
- W2316088956 magId "2316088956" @default.
- W2316088956 workType "article" @default.