Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316154552> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2316154552 abstract "This study is dedicated to perform nonlinear asymptotic analysis based on the continuous thin plate model of MEMS capacitive sensor/actuator in order to predict the pull-in voltages/positions more precisely than past works. In these past studies, only discrete models without residual stress were considered. A sensor/actuator is considered in structure of two parallel electrostatically-charged flexible square plates — one thin plate in persistent vibrations to reflect external pressure and another thick plate in relative still as the backplate. The dynamic model in the form of the partial differential equation for the parallel plates is first established based on the balance among plate flexibility, residual stress and electrostatic forces. Assuming harmonic deflection for the vibrating plate clamped on boundaries, Galerkin method is used to decompose the established system p.d.e. into discrete modal equations. Solving the discrete modal equations, plate deflection can be obtained. The pull-in position is next solved from the condition that as the pull-in occurs the electrostatic attraction force on the deflected plate exceeds the elastic restoring force by the deflected plate. It is found from analysis results for some case study that the pull-in position is 1.66 μm with air gap of 3.75 μm. This predicted pull-in position is smaller than the predict position from past works, two-thirds of the gap. In addition to theoretical analysis, experiments are also conducted to verify the correctness of the established model." @default.
- W2316154552 created "2016-06-24" @default.
- W2316154552 creator A5020433598 @default.
- W2316154552 creator A5071654078 @default.
- W2316154552 date "2005-01-01" @default.
- W2316154552 modified "2023-10-17" @default.
- W2316154552 title "Precise Prediction on Pull-In Instability of a Deformable Micro-Plate Actuated by Distributed Electrostatic Force and Approximate Closed-Form Solutions" @default.
- W2316154552 cites W1976785637 @default.
- W2316154552 cites W1979109011 @default.
- W2316154552 cites W2017262538 @default.
- W2316154552 cites W2022344696 @default.
- W2316154552 cites W2050460374 @default.
- W2316154552 cites W2097524500 @default.
- W2316154552 cites W2101505555 @default.
- W2316154552 cites W2122454644 @default.
- W2316154552 cites W2126046506 @default.
- W2316154552 cites W2139683165 @default.
- W2316154552 cites W2154050130 @default.
- W2316154552 cites W2156014908 @default.
- W2316154552 cites W2167394615 @default.
- W2316154552 cites W2179402527 @default.
- W2316154552 cites W4239023642 @default.
- W2316154552 doi "https://doi.org/10.1115/imece2005-82241" @default.
- W2316154552 hasPublicationYear "2005" @default.
- W2316154552 type Work @default.
- W2316154552 sameAs 2316154552 @default.
- W2316154552 citedByCount "1" @default.
- W2316154552 countsByYear W23161545522017 @default.
- W2316154552 crossrefType "proceedings-article" @default.
- W2316154552 hasAuthorship W2316154552A5020433598 @default.
- W2316154552 hasAuthorship W2316154552A5071654078 @default.
- W2316154552 hasConcept C10138342 @default.
- W2316154552 hasConcept C104286136 @default.
- W2316154552 hasConcept C119599485 @default.
- W2316154552 hasConcept C121332964 @default.
- W2316154552 hasConcept C127413603 @default.
- W2316154552 hasConcept C134306372 @default.
- W2316154552 hasConcept C135628077 @default.
- W2316154552 hasConcept C158622935 @default.
- W2316154552 hasConcept C162324750 @default.
- W2316154552 hasConcept C16826683 @default.
- W2316154552 hasConcept C172707124 @default.
- W2316154552 hasConcept C175853643 @default.
- W2316154552 hasConcept C186899397 @default.
- W2316154552 hasConcept C188027245 @default.
- W2316154552 hasConcept C192562407 @default.
- W2316154552 hasConcept C198082294 @default.
- W2316154552 hasConcept C198394728 @default.
- W2316154552 hasConcept C207821765 @default.
- W2316154552 hasConcept C24890656 @default.
- W2316154552 hasConcept C2781355719 @default.
- W2316154552 hasConcept C33923547 @default.
- W2316154552 hasConcept C57879066 @default.
- W2316154552 hasConcept C62520636 @default.
- W2316154552 hasConcept C66938386 @default.
- W2316154552 hasConcept C71139939 @default.
- W2316154552 hasConcept C74650414 @default.
- W2316154552 hasConceptScore W2316154552C10138342 @default.
- W2316154552 hasConceptScore W2316154552C104286136 @default.
- W2316154552 hasConceptScore W2316154552C119599485 @default.
- W2316154552 hasConceptScore W2316154552C121332964 @default.
- W2316154552 hasConceptScore W2316154552C127413603 @default.
- W2316154552 hasConceptScore W2316154552C134306372 @default.
- W2316154552 hasConceptScore W2316154552C135628077 @default.
- W2316154552 hasConceptScore W2316154552C158622935 @default.
- W2316154552 hasConceptScore W2316154552C162324750 @default.
- W2316154552 hasConceptScore W2316154552C16826683 @default.
- W2316154552 hasConceptScore W2316154552C172707124 @default.
- W2316154552 hasConceptScore W2316154552C175853643 @default.
- W2316154552 hasConceptScore W2316154552C186899397 @default.
- W2316154552 hasConceptScore W2316154552C188027245 @default.
- W2316154552 hasConceptScore W2316154552C192562407 @default.
- W2316154552 hasConceptScore W2316154552C198082294 @default.
- W2316154552 hasConceptScore W2316154552C198394728 @default.
- W2316154552 hasConceptScore W2316154552C207821765 @default.
- W2316154552 hasConceptScore W2316154552C24890656 @default.
- W2316154552 hasConceptScore W2316154552C2781355719 @default.
- W2316154552 hasConceptScore W2316154552C33923547 @default.
- W2316154552 hasConceptScore W2316154552C57879066 @default.
- W2316154552 hasConceptScore W2316154552C62520636 @default.
- W2316154552 hasConceptScore W2316154552C66938386 @default.
- W2316154552 hasConceptScore W2316154552C71139939 @default.
- W2316154552 hasConceptScore W2316154552C74650414 @default.
- W2316154552 hasLocation W23161545521 @default.
- W2316154552 hasOpenAccess W2316154552 @default.
- W2316154552 hasPrimaryLocation W23161545521 @default.
- W2316154552 hasRelatedWork W1973973021 @default.
- W2316154552 hasRelatedWork W1975479962 @default.
- W2316154552 hasRelatedWork W1983948570 @default.
- W2316154552 hasRelatedWork W2068518373 @default.
- W2316154552 hasRelatedWork W2081483185 @default.
- W2316154552 hasRelatedWork W2338362246 @default.
- W2316154552 hasRelatedWork W2368751806 @default.
- W2316154552 hasRelatedWork W2987842672 @default.
- W2316154552 hasRelatedWork W3000924672 @default.
- W2316154552 hasRelatedWork W279319843 @default.
- W2316154552 isParatext "false" @default.
- W2316154552 isRetracted "false" @default.
- W2316154552 magId "2316154552" @default.
- W2316154552 workType "article" @default.