FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316180299> ?p ?o ?g. }

• W2316180299 endingPage "3330" @default.
• W2316180299 startingPage "3325" @default.
• W2316180299 abstract "Adhesion is a big concern for the design of Si-based microelectromechanical devices. A ZnO film with nanoscale surface roughness is a promising candidate to decrease adhesion as the protective coating. In this study, the adhesion force of ZnO films prepared by atomic layer deposition (ALD) on a Si (100) substrate was studied. The root-mean-square (RMS) roughness of the ZnO films was in the range of 0.7–4.28 nm, and the contact angle of water was in the range of 85–88°. The adhesion force was measured by atomic force microscopy (AFM) at both low (12%) and high (60%) relative humidities. The results show that the adhesion force decreases as the surface roughness increases. A low adhesion force at high RMS roughness is attributed to the large asperities on the film, and a large adhesion force at high humidity is attributed to the large capillary force. The experimental adhesion force was compared to the force calculated using the Rabinovich model. Although the theoretical value underestimates the experimental value, the proportion of the two components of the adhesion force is clearly shown. At the low humidity, the van der Waals force component differs not greatly with the capillary force component, while at the high humidity, the capillary force component becomes dominant." @default.
• W2316180299 created "2016-06-24" @default.
• W2316180299 creator A5004326219 @default.
• W2316180299 creator A5009142226 @default.
• W2316180299 creator A5010026629 @default.
• W2316180299 creator A5080723487 @default.
• W2316180299 date "2014-02-17" @default.
• W2316180299 modified "2023-09-30" @default.
• W2316180299 title "Reducing Adhesion Force by Means of Atomic Layer Deposition of ZnO Films with Nanoscale Surface Roughness" @default.
• W2316180299 cites W1486984234 @default.
• W2316180299 cites W1968552182 @default.
• W2316180299 cites W1975216008 @default.
• W2316180299 cites W1977784674 @default.
• W2316180299 cites W1988573687 @default.
• W2316180299 cites W1988915430 @default.
• W2316180299 cites W1995874295 @default.
• W2316180299 cites W2000817295 @default.
• W2316180299 cites W2006899770 @default.
• W2316180299 cites W2015384452 @default.
• W2316180299 cites W2017173496 @default.
• W2316180299 cites W2019206684 @default.
• W2316180299 cites W2024977515 @default.
• W2316180299 cites W2025857352 @default.
• W2316180299 cites W2028656288 @default.
• W2316180299 cites W2029884361 @default.
• W2316180299 cites W2038413350 @default.
• W2316180299 cites W2041278880 @default.
• W2316180299 cites W2065954798 @default.
• W2316180299 cites W2071933102 @default.
• W2316180299 cites W2074128422 @default.
• W2316180299 cites W2079443418 @default.
• W2316180299 cites W2080661125 @default.
• W2316180299 cites W2082522290 @default.
• W2316180299 cites W2088060504 @default.
• W2316180299 cites W2088290003 @default.
• W2316180299 cites W2091502997 @default.
• W2316180299 cites W2102374119 @default.
• W2316180299 cites W2112751173 @default.
• W2316180299 cites W2129969182 @default.
• W2316180299 cites W2136847564 @default.
• W2316180299 cites W2145578865 @default.
• W2316180299 cites W2150903279 @default.
• W2316180299 cites W2158932701 @default.
• W2316180299 cites W2325933120 @default.
• W2316180299 cites W2577976399 @default.
• W2316180299 cites W3184755214 @default.
• W2316180299 doi "https://doi.org/10.1021/am4053333" @default.
• W2316180299 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24506135" @default.
• W2316180299 hasPublicationYear "2014" @default.
• W2316180299 type Work @default.
• W2316180299 sameAs 2316180299 @default.
• W2316180299 citedByCount "40" @default.
• W2316180299 countsByYear W23161802992014 @default.
• W2316180299 countsByYear W23161802992015 @default.
• W2316180299 countsByYear W23161802992016 @default.
• W2316180299 countsByYear W23161802992017 @default.
• W2316180299 countsByYear W23161802992018 @default.
• W2316180299 countsByYear W23161802992019 @default.
• W2316180299 countsByYear W23161802992020 @default.
• W2316180299 countsByYear W23161802992021 @default.
• W2316180299 countsByYear W23161802992022 @default.
• W2316180299 countsByYear W23161802992023 @default.
• W2316180299 crossrefType "journal-article" @default.
• W2316180299 hasAuthorship W2316180299A5004326219 @default.
• W2316180299 hasAuthorship W2316180299A5009142226 @default.
• W2316180299 hasAuthorship W2316180299A5010026629 @default.
• W2316180299 hasAuthorship W2316180299A5080723487 @default.
• W2316180299 hasConcept C102951782 @default.
• W2316180299 hasConcept C107365816 @default.
• W2316180299 hasConcept C111368507 @default.
• W2316180299 hasConcept C121332964 @default.
• W2316180299 hasConcept C126061179 @default.
• W2316180299 hasConcept C127313418 @default.
• W2316180299 hasConcept C158960510 @default.
• W2316180299 hasConcept C159985019 @default.
• W2316180299 hasConcept C171250308 @default.
• W2316180299 hasConcept C178790620 @default.
• W2316180299 hasConcept C185592680 @default.
• W2316180299 hasConcept C192562407 @default.
• W2316180299 hasConcept C196806460 @default.
• W2316180299 hasConcept C2777289219 @default.
• W2316180299 hasConcept C2779227376 @default.
• W2316180299 hasConcept C2781448156 @default.
• W2316180299 hasConcept C32909587 @default.
• W2316180299 hasConcept C45206210 @default.
• W2316180299 hasConcept C71039073 @default.
• W2316180299 hasConcept C84416704 @default.
• W2316180299 hasConcept C97355855 @default.
• W2316180299 hasConceptScore W2316180299C102951782 @default.
• W2316180299 hasConceptScore W2316180299C107365816 @default.
• W2316180299 hasConceptScore W2316180299C111368507 @default.
• W2316180299 hasConceptScore W2316180299C121332964 @default.
• W2316180299 hasConceptScore W2316180299C126061179 @default.
• W2316180299 hasConceptScore W2316180299C127313418 @default.
• W2316180299 hasConceptScore W2316180299C158960510 @default.
• W2316180299 hasConceptScore W2316180299C159985019 @default.
• W2316180299 hasConceptScore W2316180299C171250308 @default.
• W2316180299 hasConceptScore W2316180299C178790620 @default.

• next