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- W2316229682 abstract "マイクロマシン技術について, その概要を述べ, 主要な要素技術の研究開発状況を紹介する.さらに, 各国が進めている研究開発プロジェクトについて, 通商産業省の大型プロジェクト「マイクロマシン技術の研究開発」等を中心に紹介する." @default.
- W2316229682 created "2016-06-24" @default.
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- W2316229682 date "1993-01-01" @default.
- W2316229682 modified "2023-09-26" @default.
- W2316229682 title "Micro Machine Technology." @default.
- W2316229682 doi "https://doi.org/10.3169/itej1978.47.965" @default.
- W2316229682 hasPublicationYear "1993" @default.
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