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- W2316361347 abstract "Periodic structures of Si(001) and quartz glass master-matrices with the period of 4 μm and the polymer replicas fabricated by imprint lithography and UV light hardening techniques were investigated. The profile of the structures was examined by atomic force microscopy. Diffraction efficiency of the periodic structures was measured experimentally and calculated theoretically employing the integral technique. The results obtained show the diffraction efficiency to be an efficient tool for the control of surface relief formation during etching of master-matrix and its replication. It is shown that the quartz glass master-matrix is more efficient both for the imprint and UV hardening polymer replication as compared to the silicon one." @default.
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- W2316361347 date "2004-01-01" @default.
- W2316361347 modified "2023-10-16" @default.
- W2316361347 title "Replication of periodic structures in polymer materiais" @default.
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- W2316361347 doi "https://doi.org/10.3952/lithjphys.44504" @default.
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