FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316369114> ?p ?o ?g. }

• W2316369114 endingPage "1580" @default.
• W2316369114 startingPage "1577" @default.
• W2316369114 abstract "We report an atomic layer deposition chamber for in-situ synchrotron X-ray scattering study of thin film growth. The chamber was designed for combined synchrotron X-ray reflectivity and two-dimensional grazing-incidence X-ray diffraction measurement to do a in-situ monitoring of ALD growth. We demonstrate ruthenium thermal ALD growth for the performance of the chamber. 10, 20, 30, 50, 70, 100, 150 and 250-cycled states are measured by X-ray scattering methods during ALD growth process. Growth rate is calculated from thickness values and the surface roughness of each state is estimated by X-ray reflectivity analysis. The crystal structure of initial growth state is observed by Grazing-incidence X-ray diffraction. These results indicate that in-situ X-ray scattering method is a promising analysis technique to investigate the initial physical morphology of ALD films." @default.
• W2316369114 created "2016-06-24" @default.
• W2316369114 creator A5017714002 @default.
• W2316369114 creator A5044553288 @default.
• W2316369114 creator A5048791612 @default.
• W2316369114 creator A5052991391 @default.
• W2316369114 creator A5057116936 @default.
• W2316369114 creator A5057497927 @default.
• W2316369114 creator A5067237923 @default.
• W2316369114 creator A5087102705 @default.
• W2316369114 date "2011-02-01" @default.
• W2316369114 modified "2023-09-25" @default.
• W2316369114 title "<i>In-Situ</i> Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition" @default.
• W2316369114 doi "https://doi.org/10.1166/jnn.2011.3399" @default.
• W2316369114 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21456240" @default.
• W2316369114 hasPublicationYear "2011" @default.
• W2316369114 type Work @default.
• W2316369114 sameAs 2316369114 @default.
• W2316369114 citedByCount "5" @default.
• W2316369114 countsByYear W23163691142013 @default.
• W2316369114 countsByYear W23163691142015 @default.
• W2316369114 countsByYear W23163691142016 @default.
• W2316369114 countsByYear W23163691142022 @default.
• W2316369114 crossrefType "journal-article" @default.
• W2316369114 hasAuthorship W2316369114A5017714002 @default.
• W2316369114 hasAuthorship W2316369114A5044553288 @default.
• W2316369114 hasAuthorship W2316369114A5048791612 @default.
• W2316369114 hasAuthorship W2316369114A5052991391 @default.
• W2316369114 hasAuthorship W2316369114A5057116936 @default.
• W2316369114 hasAuthorship W2316369114A5057497927 @default.
• W2316369114 hasAuthorship W2316369114A5067237923 @default.
• W2316369114 hasAuthorship W2316369114A5087102705 @default.
• W2316369114 hasConcept C107365816 @default.
• W2316369114 hasConcept C113196181 @default.
• W2316369114 hasConcept C120665830 @default.
• W2316369114 hasConcept C121332964 @default.
• W2316369114 hasConcept C151730666 @default.
• W2316369114 hasConcept C159985019 @default.
• W2316369114 hasConcept C16332341 @default.
• W2316369114 hasConcept C171250308 @default.
• W2316369114 hasConcept C178790620 @default.
• W2316369114 hasConcept C185592680 @default.
• W2316369114 hasConcept C19067145 @default.
• W2316369114 hasConcept C191486275 @default.
• W2316369114 hasConcept C192562407 @default.
• W2316369114 hasConcept C207114421 @default.
• W2316369114 hasConcept C21368211 @default.
• W2316369114 hasConcept C2777822432 @default.
• W2316369114 hasConcept C2779227376 @default.
• W2316369114 hasConcept C2779328170 @default.
• W2316369114 hasConcept C2816523 @default.
• W2316369114 hasConcept C43617362 @default.
• W2316369114 hasConcept C50515024 @default.
• W2316369114 hasConcept C55148256 @default.
• W2316369114 hasConcept C64297162 @default.
• W2316369114 hasConcept C69544855 @default.
• W2316369114 hasConcept C86803240 @default.
• W2316369114 hasConceptScore W2316369114C107365816 @default.
• W2316369114 hasConceptScore W2316369114C113196181 @default.
• W2316369114 hasConceptScore W2316369114C120665830 @default.
• W2316369114 hasConceptScore W2316369114C121332964 @default.
• W2316369114 hasConceptScore W2316369114C151730666 @default.
• W2316369114 hasConceptScore W2316369114C159985019 @default.
• W2316369114 hasConceptScore W2316369114C16332341 @default.
• W2316369114 hasConceptScore W2316369114C171250308 @default.
• W2316369114 hasConceptScore W2316369114C178790620 @default.
• W2316369114 hasConceptScore W2316369114C185592680 @default.
• W2316369114 hasConceptScore W2316369114C19067145 @default.
• W2316369114 hasConceptScore W2316369114C191486275 @default.
• W2316369114 hasConceptScore W2316369114C192562407 @default.
• W2316369114 hasConceptScore W2316369114C207114421 @default.
• W2316369114 hasConceptScore W2316369114C21368211 @default.
• W2316369114 hasConceptScore W2316369114C2777822432 @default.
• W2316369114 hasConceptScore W2316369114C2779227376 @default.
• W2316369114 hasConceptScore W2316369114C2779328170 @default.
• W2316369114 hasConceptScore W2316369114C2816523 @default.
• W2316369114 hasConceptScore W2316369114C43617362 @default.
• W2316369114 hasConceptScore W2316369114C50515024 @default.
• W2316369114 hasConceptScore W2316369114C55148256 @default.
• W2316369114 hasConceptScore W2316369114C64297162 @default.
• W2316369114 hasConceptScore W2316369114C69544855 @default.
• W2316369114 hasConceptScore W2316369114C86803240 @default.
• W2316369114 hasIssue "2" @default.
• W2316369114 hasLocation W23163691141 @default.
• W2316369114 hasLocation W23163691142 @default.
• W2316369114 hasOpenAccess W2316369114 @default.
• W2316369114 hasPrimaryLocation W23163691141 @default.
• W2316369114 hasRelatedWork W1967739584 @default.
• W2316369114 hasRelatedWork W2061731987 @default.
• W2316369114 hasRelatedWork W2072378435 @default.
• W2316369114 hasRelatedWork W2356727187 @default.
• W2316369114 hasRelatedWork W2374229602 @default.
• W2316369114 hasRelatedWork W2472146298 @default.
• W2316369114 hasRelatedWork W2516947202 @default.
• W2316369114 hasRelatedWork W3712171 @default.
• W2316369114 hasRelatedWork W4252561321 @default.
• W2316369114 hasRelatedWork W1970309424 @default.
• W2316369114 hasVolume "11" @default.

• next