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- W2316394427 endingPage "428" @default.
- W2316394427 startingPage "417" @default.
- W2316394427 abstract "Comparative investigations of silicon layer exfoliation within the Smart-Cut process and its progression at lower H+ implantation doses and subsequent H-plasma exposure (Soft-Cut) were done by µ-Raman spectroscopy, scanning electron microscopy (SEM) and atomic force microscopy (AFM) on (100)-oriented Cz Si wafers. Blister formation and evolution at various process temperatures were analyzed to clarify the mechanisms of layer exfoliation for both approaches. On base of the Raman analyses and supporting SEM and AFM measurements of samples prepared under various process temperatures, we identified the V2H6 defect complexes as the precursor of blisters for the Smart-Cut scenario. Under Soft-Cut conditions (100)-oriented platelets created during H-plasma exposure can be identified as the prevailing precursors of blisters." @default.
- W2316394427 created "2016-06-24" @default.
- W2316394427 creator A5008201330 @default.
- W2316394427 creator A5017162986 @default.
- W2316394427 creator A5020566485 @default.
- W2316394427 creator A5047687678 @default.
- W2316394427 date "2006-10-20" @default.
- W2316394427 modified "2023-10-18" @default.
- W2316394427 title "From Smart-Cut to Soft-Cut: Mechanisms of Hydrogen Plasma Supported Layer Exfoliation in Silicon" @default.
- W2316394427 doi "https://doi.org/10.1149/1.2355776" @default.
- W2316394427 hasPublicationYear "2006" @default.
- W2316394427 type Work @default.
- W2316394427 sameAs 2316394427 @default.
- W2316394427 citedByCount "3" @default.
- W2316394427 countsByYear W23163944272016 @default.
- W2316394427 crossrefType "journal-article" @default.
- W2316394427 hasAuthorship W2316394427A5008201330 @default.
- W2316394427 hasAuthorship W2316394427A5017162986 @default.
- W2316394427 hasAuthorship W2316394427A5020566485 @default.
- W2316394427 hasAuthorship W2316394427A5047687678 @default.
- W2316394427 hasConcept C100460472 @default.
- W2316394427 hasConcept C120665830 @default.
- W2316394427 hasConcept C121332964 @default.
- W2316394427 hasConcept C127413603 @default.
- W2316394427 hasConcept C129162502 @default.
- W2316394427 hasConcept C159985019 @default.
- W2316394427 hasConcept C160671074 @default.
- W2316394427 hasConcept C171250308 @default.
- W2316394427 hasConcept C192562407 @default.
- W2316394427 hasConcept C26771246 @default.
- W2316394427 hasConcept C2779227376 @default.
- W2316394427 hasConcept C2780949179 @default.
- W2316394427 hasConcept C30080830 @default.
- W2316394427 hasConcept C40003534 @default.
- W2316394427 hasConcept C42360764 @default.
- W2316394427 hasConcept C49040817 @default.
- W2316394427 hasConcept C49326732 @default.
- W2316394427 hasConcept C544956773 @default.
- W2316394427 hasConcept C62520636 @default.
- W2316394427 hasConcept C82706917 @default.
- W2316394427 hasConceptScore W2316394427C100460472 @default.
- W2316394427 hasConceptScore W2316394427C120665830 @default.
- W2316394427 hasConceptScore W2316394427C121332964 @default.
- W2316394427 hasConceptScore W2316394427C127413603 @default.
- W2316394427 hasConceptScore W2316394427C129162502 @default.
- W2316394427 hasConceptScore W2316394427C159985019 @default.
- W2316394427 hasConceptScore W2316394427C160671074 @default.
- W2316394427 hasConceptScore W2316394427C171250308 @default.
- W2316394427 hasConceptScore W2316394427C192562407 @default.
- W2316394427 hasConceptScore W2316394427C26771246 @default.
- W2316394427 hasConceptScore W2316394427C2779227376 @default.
- W2316394427 hasConceptScore W2316394427C2780949179 @default.
- W2316394427 hasConceptScore W2316394427C30080830 @default.
- W2316394427 hasConceptScore W2316394427C40003534 @default.
- W2316394427 hasConceptScore W2316394427C42360764 @default.
- W2316394427 hasConceptScore W2316394427C49040817 @default.
- W2316394427 hasConceptScore W2316394427C49326732 @default.
- W2316394427 hasConceptScore W2316394427C544956773 @default.
- W2316394427 hasConceptScore W2316394427C62520636 @default.
- W2316394427 hasConceptScore W2316394427C82706917 @default.
- W2316394427 hasIssue "4" @default.
- W2316394427 hasLocation W23163944271 @default.
- W2316394427 hasOpenAccess W2316394427 @default.
- W2316394427 hasPrimaryLocation W23163944271 @default.
- W2316394427 hasRelatedWork W1979895992 @default.
- W2316394427 hasRelatedWork W1997489168 @default.
- W2316394427 hasRelatedWork W2044655306 @default.
- W2316394427 hasRelatedWork W2049708184 @default.
- W2316394427 hasRelatedWork W2079491736 @default.
- W2316394427 hasRelatedWork W2088423929 @default.
- W2316394427 hasRelatedWork W2135249421 @default.
- W2316394427 hasRelatedWork W2319970007 @default.
- W2316394427 hasRelatedWork W2783870279 @default.
- W2316394427 hasRelatedWork W3014990327 @default.
- W2316394427 hasVolume "3" @default.
- W2316394427 isParatext "false" @default.
- W2316394427 isRetracted "false" @default.
- W2316394427 magId "2316394427" @default.
- W2316394427 workType "article" @default.