Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316506211> ?p ?o ?g. }
Showing items 1 to 46 of
46
with 100 items per page.
- W2316506211 endingPage "345" @default.
- W2316506211 startingPage "341" @default.
- W2316506211 abstract "Article 2D-Koordinatenmeßtechnik für Mikron-Strukturen auf Halbleiter-Masken / Submicron metrology for masks was published on December 1, 1988 in the journal tm - Technisches Messen (volume 55, issue JG)." @default.
- W2316506211 created "2016-06-24" @default.
- W2316506211 creator A5014618905 @default.
- W2316506211 creator A5034696601 @default.
- W2316506211 date "1988-12-01" @default.
- W2316506211 modified "2023-09-25" @default.
- W2316506211 title "2D-Koordinatenmeßtechnik für Mikron-Strukturen auf Halbleiter-Masken / Submicron metrology for masks" @default.
- W2316506211 doi "https://doi.org/10.1524/teme.1988.55.jg.341" @default.
- W2316506211 hasPublicationYear "1988" @default.
- W2316506211 type Work @default.
- W2316506211 sameAs 2316506211 @default.
- W2316506211 citedByCount "1" @default.
- W2316506211 crossrefType "journal-article" @default.
- W2316506211 hasAuthorship W2316506211A5014618905 @default.
- W2316506211 hasAuthorship W2316506211A5034696601 @default.
- W2316506211 hasConcept C120665830 @default.
- W2316506211 hasConcept C121332964 @default.
- W2316506211 hasConcept C171250308 @default.
- W2316506211 hasConcept C192562407 @default.
- W2316506211 hasConcept C195766429 @default.
- W2316506211 hasConceptScore W2316506211C120665830 @default.
- W2316506211 hasConceptScore W2316506211C121332964 @default.
- W2316506211 hasConceptScore W2316506211C171250308 @default.
- W2316506211 hasConceptScore W2316506211C192562407 @default.
- W2316506211 hasConceptScore W2316506211C195766429 @default.
- W2316506211 hasIssue "JG" @default.
- W2316506211 hasLocation W23165062111 @default.
- W2316506211 hasOpenAccess W2316506211 @default.
- W2316506211 hasPrimaryLocation W23165062111 @default.
- W2316506211 hasRelatedWork W2014792896 @default.
- W2316506211 hasRelatedWork W2052196060 @default.
- W2316506211 hasRelatedWork W2611066839 @default.
- W2316506211 hasRelatedWork W2743881251 @default.
- W2316506211 hasRelatedWork W2917530576 @default.
- W2316506211 hasRelatedWork W3000789669 @default.
- W2316506211 hasRelatedWork W3013100106 @default.
- W2316506211 hasRelatedWork W3210768802 @default.
- W2316506211 hasRelatedWork W925732399 @default.
- W2316506211 hasRelatedWork W2737007833 @default.
- W2316506211 hasVolume "55" @default.
- W2316506211 isParatext "false" @default.
- W2316506211 isRetracted "false" @default.
- W2316506211 magId "2316506211" @default.
- W2316506211 workType "article" @default.