Matches in SemOpenAlex for { <https://semopenalex.org/work/W2316983896> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2316983896 endingPage "56" @default.
- W2316983896 startingPage "52" @default.
- W2316983896 abstract "Discharge characteristics at 1 MHz in CF4/O2 mixture at the total pressure of 66.5 Pa (0.5 Torr) have been investigated by electrical and optical methods. The discharge parameters such as the discharge-sustaining voltage and the discharge current in CF4/O2 discharge vary synergistically as a function of the gas mixing ratio. As mixing CF4 gas with O2 gas, the discharge mode varies from hollow plasma distribution in O2 discharge to uniform one in CF4/O2 discharge. In a range of CF4 ratio from 50 to 95%, the electron temperature increases over that in O2 discharge, and furthermore the intense photo-emission in front of the instantaneous anode due to the double layer is observed around the phases of ωt =π/2 and 3π/2. This emission profile is similar to that in strong electronegative SF6 discharge. These findings seem to come from the enhancement of electronegativity in CF4/O2 discharge at large CF4 mixting ratio." @default.
- W2316983896 created "2016-06-24" @default.
- W2316983896 creator A5002566742 @default.
- W2316983896 creator A5004044136 @default.
- W2316983896 creator A5005045379 @default.
- W2316983896 creator A5008868507 @default.
- W2316983896 creator A5089047167 @default.
- W2316983896 creator A5091057890 @default.
- W2316983896 date "1998-01-01" @default.
- W2316983896 modified "2023-10-04" @default.
- W2316983896 title "Characteristics of 1 MHz Discharge in CF4/O2 Mixture." @default.
- W2316983896 doi "https://doi.org/10.3131/jvsj.41.52" @default.
- W2316983896 hasPublicationYear "1998" @default.
- W2316983896 type Work @default.
- W2316983896 sameAs 2316983896 @default.
- W2316983896 citedByCount "0" @default.
- W2316983896 crossrefType "journal-article" @default.
- W2316983896 hasAuthorship W2316983896A5002566742 @default.
- W2316983896 hasAuthorship W2316983896A5004044136 @default.
- W2316983896 hasAuthorship W2316983896A5005045379 @default.
- W2316983896 hasAuthorship W2316983896A5008868507 @default.
- W2316983896 hasAuthorship W2316983896A5089047167 @default.
- W2316983896 hasAuthorship W2316983896A5091057890 @default.
- W2316983896 hasBestOaLocation W23169838961 @default.
- W2316983896 hasConcept C113196181 @default.
- W2316983896 hasConcept C114375839 @default.
- W2316983896 hasConcept C119599485 @default.
- W2316983896 hasConcept C121332964 @default.
- W2316983896 hasConcept C125989502 @default.
- W2316983896 hasConcept C127413603 @default.
- W2316983896 hasConcept C131097465 @default.
- W2316983896 hasConcept C138777275 @default.
- W2316983896 hasConcept C147789679 @default.
- W2316983896 hasConcept C159985019 @default.
- W2316983896 hasConcept C17525397 @default.
- W2316983896 hasConcept C177293861 @default.
- W2316983896 hasConcept C178790620 @default.
- W2316983896 hasConcept C18459110 @default.
- W2316983896 hasConcept C184779094 @default.
- W2316983896 hasConcept C185592680 @default.
- W2316983896 hasConcept C192562407 @default.
- W2316983896 hasConcept C204323151 @default.
- W2316983896 hasConcept C30254895 @default.
- W2316983896 hasConcept C30646810 @default.
- W2316983896 hasConcept C43617362 @default.
- W2316983896 hasConcept C62520636 @default.
- W2316983896 hasConcept C82706917 @default.
- W2316983896 hasConcept C89395315 @default.
- W2316983896 hasConcept C97355855 @default.
- W2316983896 hasConceptScore W2316983896C113196181 @default.
- W2316983896 hasConceptScore W2316983896C114375839 @default.
- W2316983896 hasConceptScore W2316983896C119599485 @default.
- W2316983896 hasConceptScore W2316983896C121332964 @default.
- W2316983896 hasConceptScore W2316983896C125989502 @default.
- W2316983896 hasConceptScore W2316983896C127413603 @default.
- W2316983896 hasConceptScore W2316983896C131097465 @default.
- W2316983896 hasConceptScore W2316983896C138777275 @default.
- W2316983896 hasConceptScore W2316983896C147789679 @default.
- W2316983896 hasConceptScore W2316983896C159985019 @default.
- W2316983896 hasConceptScore W2316983896C17525397 @default.
- W2316983896 hasConceptScore W2316983896C177293861 @default.
- W2316983896 hasConceptScore W2316983896C178790620 @default.
- W2316983896 hasConceptScore W2316983896C18459110 @default.
- W2316983896 hasConceptScore W2316983896C184779094 @default.
- W2316983896 hasConceptScore W2316983896C185592680 @default.
- W2316983896 hasConceptScore W2316983896C192562407 @default.
- W2316983896 hasConceptScore W2316983896C204323151 @default.
- W2316983896 hasConceptScore W2316983896C30254895 @default.
- W2316983896 hasConceptScore W2316983896C30646810 @default.
- W2316983896 hasConceptScore W2316983896C43617362 @default.
- W2316983896 hasConceptScore W2316983896C62520636 @default.
- W2316983896 hasConceptScore W2316983896C82706917 @default.
- W2316983896 hasConceptScore W2316983896C89395315 @default.
- W2316983896 hasConceptScore W2316983896C97355855 @default.
- W2316983896 hasIssue "2" @default.
- W2316983896 hasLocation W23169838961 @default.
- W2316983896 hasOpenAccess W2316983896 @default.
- W2316983896 hasPrimaryLocation W23169838961 @default.
- W2316983896 hasRelatedWork W1970493571 @default.
- W2316983896 hasRelatedWork W1990919541 @default.
- W2316983896 hasRelatedWork W2040180438 @default.
- W2316983896 hasRelatedWork W2077582934 @default.
- W2316983896 hasRelatedWork W2119572064 @default.
- W2316983896 hasRelatedWork W2162992457 @default.
- W2316983896 hasRelatedWork W3010242950 @default.
- W2316983896 hasRelatedWork W4301367223 @default.
- W2316983896 hasRelatedWork W4320001837 @default.
- W2316983896 hasRelatedWork W1980530391 @default.
- W2316983896 hasVolume "41" @default.
- W2316983896 isParatext "false" @default.
- W2316983896 isRetracted "false" @default.
- W2316983896 magId "2316983896" @default.
- W2316983896 workType "article" @default.