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- W2317308228 abstract "This paper describes the effects of conditions, such as prebaking length, exposure energy, and postbaking temperature, on polybutadiene resist film formation, when obtaining high chemical resistance to hot phosphoric acid etchant. After alumina ceramic was etched at temperatures from 260°C to 320°C, we measured the change in resist thickness, resist film breakdown ratio, and etch factors. Polybutadiene molecules are cross-linked both photolytically and pyrolytically, so postbaking critically affects the enhancing of the resist's thermal and chemical stability. Prebaking at 80°C for 30min, exposure at 7-9mJ/cm2, and postbaking at 300°C for 30min yielded a highly chemically resistant, strongly adhesive, optimal resist film. The etch factor increased with increasing etching temperature, probably due to decreased acid viscosity, becoming about 2 at an etching temperature of 300°C. At higher etching temperatures, however, the etch factor decreased and the resist breakdown ratio increased, indicating that the applicable maximum etching temperature was 300°C for the polybutadiene resist." @default.
- W2317308228 created "2016-06-24" @default.
- W2317308228 creator A5001830605 @default.
- W2317308228 creator A5027968179 @default.
- W2317308228 creator A5082127173 @default.
- W2317308228 date "1998-01-01" @default.
- W2317308228 modified "2023-09-23" @default.
- W2317308228 title "Formation of Cyclized Polybutadiene Resist Film for Ceramic Photoetching." @default.
- W2317308228 doi "https://doi.org/10.4139/sfj.49.775" @default.
- W2317308228 hasPublicationYear "1998" @default.
- W2317308228 type Work @default.
- W2317308228 sameAs 2317308228 @default.
- W2317308228 citedByCount "0" @default.
- W2317308228 crossrefType "journal-article" @default.
- W2317308228 hasAuthorship W2317308228A5001830605 @default.
- W2317308228 hasAuthorship W2317308228A5027968179 @default.
- W2317308228 hasAuthorship W2317308228A5082127173 @default.
- W2317308228 hasBestOaLocation W23173082281 @default.
- W2317308228 hasConcept C100460472 @default.
- W2317308228 hasConcept C127172972 @default.
- W2317308228 hasConcept C127413603 @default.
- W2317308228 hasConcept C134132462 @default.
- W2317308228 hasConcept C15920480 @default.
- W2317308228 hasConcept C159985019 @default.
- W2317308228 hasConcept C191897082 @default.
- W2317308228 hasConcept C192562407 @default.
- W2317308228 hasConcept C2776622989 @default.
- W2317308228 hasConcept C2779227376 @default.
- W2317308228 hasConcept C2780901341 @default.
- W2317308228 hasConcept C33220542 @default.
- W2317308228 hasConcept C42360764 @default.
- W2317308228 hasConcept C521977710 @default.
- W2317308228 hasConcept C53524968 @default.
- W2317308228 hasConcept C59061564 @default.
- W2317308228 hasConceptScore W2317308228C100460472 @default.
- W2317308228 hasConceptScore W2317308228C127172972 @default.
- W2317308228 hasConceptScore W2317308228C127413603 @default.
- W2317308228 hasConceptScore W2317308228C134132462 @default.
- W2317308228 hasConceptScore W2317308228C15920480 @default.
- W2317308228 hasConceptScore W2317308228C159985019 @default.
- W2317308228 hasConceptScore W2317308228C191897082 @default.
- W2317308228 hasConceptScore W2317308228C192562407 @default.
- W2317308228 hasConceptScore W2317308228C2776622989 @default.
- W2317308228 hasConceptScore W2317308228C2779227376 @default.
- W2317308228 hasConceptScore W2317308228C2780901341 @default.
- W2317308228 hasConceptScore W2317308228C33220542 @default.
- W2317308228 hasConceptScore W2317308228C42360764 @default.
- W2317308228 hasConceptScore W2317308228C521977710 @default.
- W2317308228 hasConceptScore W2317308228C53524968 @default.
- W2317308228 hasConceptScore W2317308228C59061564 @default.
- W2317308228 hasLocation W23173082281 @default.
- W2317308228 hasOpenAccess W2317308228 @default.
- W2317308228 hasPrimaryLocation W23173082281 @default.
- W2317308228 hasRelatedWork W1980259285 @default.
- W2317308228 hasRelatedWork W1981018138 @default.
- W2317308228 hasRelatedWork W1981997180 @default.
- W2317308228 hasRelatedWork W1995096714 @default.
- W2317308228 hasRelatedWork W2008235616 @default.
- W2317308228 hasRelatedWork W2015083230 @default.
- W2317308228 hasRelatedWork W2024854374 @default.
- W2317308228 hasRelatedWork W2037859110 @default.
- W2317308228 hasRelatedWork W2069528716 @default.
- W2317308228 hasRelatedWork W2079746400 @default.
- W2317308228 hasRelatedWork W2082388909 @default.
- W2317308228 hasRelatedWork W2086462498 @default.
- W2317308228 hasRelatedWork W2087748769 @default.
- W2317308228 hasRelatedWork W2091617972 @default.
- W2317308228 hasRelatedWork W2823677078 @default.
- W2317308228 hasRelatedWork W2853494156 @default.
- W2317308228 hasRelatedWork W2859888396 @default.
- W2317308228 hasRelatedWork W2866878808 @default.
- W2317308228 hasRelatedWork W2881195333 @default.
- W2317308228 hasRelatedWork W3143517442 @default.
- W2317308228 isParatext "false" @default.
- W2317308228 isRetracted "false" @default.
- W2317308228 magId "2317308228" @default.
- W2317308228 workType "article" @default.