Matches in SemOpenAlex for { <https://semopenalex.org/work/W2317381100> ?p ?o ?g. }
Showing items 1 to 54 of
54
with 100 items per page.
- W2317381100 endingPage "579" @default.
- W2317381100 startingPage "573" @default.
- W2317381100 abstract "An improved method to fit the side wobble trace of a positioning setup to compensate the software was proposed to reduce the error from the mechanical swing of the focusing setup during focus plane adjustment.The alignment mark was positioned through the sub-pixel correlation template matching algorithm and the validity of the algorithm was investigated,which shows that the resolution of the algorithm is better than 0.1 μm.The positioning algorithm mentioned above was used to calculate the coordinates of the test mark while it moved up and down along with the focusing positioning setup and then the waving trace was characterized.Experimental results indicate that the mechanical swing trace can offer a good reproducibility,if the ascending and descending of the focusing setup are considered,respectively.Based on the experimental results,the model for the swing trace fitting was established and an error correction method was presented.Finally,experiments were performed to test the calibration accuracy of the model.Obtained results demonstrate that the error from the mechanical instability has been reduced to 1.29 μm from 2.84 μm,which can meet the overall alignment requirement of 2 μm." @default.
- W2317381100 created "2016-06-24" @default.
- W2317381100 creator A5036827824 @default.
- W2317381100 creator A5040329184 @default.
- W2317381100 creator A5091150766 @default.
- W2317381100 date "2011-01-01" @default.
- W2317381100 modified "2023-09-27" @default.
- W2317381100 title "Calibration of error due to mechanical swing of focusing setup in alignment system" @default.
- W2317381100 doi "https://doi.org/10.3788/ope.20111903.0573" @default.
- W2317381100 hasPublicationYear "2011" @default.
- W2317381100 type Work @default.
- W2317381100 sameAs 2317381100 @default.
- W2317381100 citedByCount "0" @default.
- W2317381100 crossrefType "journal-article" @default.
- W2317381100 hasAuthorship W2317381100A5036827824 @default.
- W2317381100 hasAuthorship W2317381100A5040329184 @default.
- W2317381100 hasAuthorship W2317381100A5091150766 @default.
- W2317381100 hasConcept C105795698 @default.
- W2317381100 hasConcept C120665830 @default.
- W2317381100 hasConcept C121332964 @default.
- W2317381100 hasConcept C165838908 @default.
- W2317381100 hasConcept C24890656 @default.
- W2317381100 hasConcept C33923547 @default.
- W2317381100 hasConcept C41008148 @default.
- W2317381100 hasConcept C65655974 @default.
- W2317381100 hasConceptScore W2317381100C105795698 @default.
- W2317381100 hasConceptScore W2317381100C120665830 @default.
- W2317381100 hasConceptScore W2317381100C121332964 @default.
- W2317381100 hasConceptScore W2317381100C165838908 @default.
- W2317381100 hasConceptScore W2317381100C24890656 @default.
- W2317381100 hasConceptScore W2317381100C33923547 @default.
- W2317381100 hasConceptScore W2317381100C41008148 @default.
- W2317381100 hasConceptScore W2317381100C65655974 @default.
- W2317381100 hasIssue "3" @default.
- W2317381100 hasLocation W23173811001 @default.
- W2317381100 hasOpenAccess W2317381100 @default.
- W2317381100 hasPrimaryLocation W23173811001 @default.
- W2317381100 hasRelatedWork W2057922068 @default.
- W2317381100 hasRelatedWork W2063105173 @default.
- W2317381100 hasRelatedWork W2094330320 @default.
- W2317381100 hasRelatedWork W2137980471 @default.
- W2317381100 hasRelatedWork W2191975524 @default.
- W2317381100 hasRelatedWork W2227841266 @default.
- W2317381100 hasRelatedWork W2230393793 @default.
- W2317381100 hasRelatedWork W2365217902 @default.
- W2317381100 hasRelatedWork W3009532610 @default.
- W2317381100 hasRelatedWork W2104907846 @default.
- W2317381100 hasVolume "19" @default.
- W2317381100 isParatext "false" @default.
- W2317381100 isRetracted "false" @default.
- W2317381100 magId "2317381100" @default.
- W2317381100 workType "article" @default.