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- W2317674889 abstract "We report the development of high sensitive Quartz Crystal Microphone using micro machining technology. The purpose of the microphone is to apply it as a sensor in gas analysis system. Moving part and gap of Quartz Crystal Microphone are manufactured by anisotropic etching and electro plating technology. It's sensitivity and anti vibration characteristics have been greatly improved compare with conventional microphones." @default.
- W2317674889 created "2016-06-24" @default.
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- W2317674889 date "2001-01-01" @default.
- W2317674889 modified "2023-10-02" @default.
- W2317674889 title "High Sensitive Quartz Crystal Microphone using Micro-Machining Technology" @default.
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- W2317674889 doi "https://doi.org/10.1541/ieejsmas.121.629" @default.
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