Matches in SemOpenAlex for { <https://semopenalex.org/work/W2317899480> ?p ?o ?g. }
- W2317899480 endingPage "21507" @default.
- W2317899480 startingPage "21499" @default.
- W2317899480 abstract "A dramatic, pH-dependent change in the steady-state chemical and morphological structure of Si(100) surfaces etched in aqueous fluoride solutions is observed with infrared spectroscopy and scanning tunneling microscopy. Low pH solutions (5 ≤ pH ≤ 7), such as the technologically important buffered oxide etchant (buffered HF), produce rough surfaces covered with nanoscale Si{110}-faceted hillocks. In contrast, higher pH solutions (7.8 ≤ pH ≤ 10), including 40% NH4F (aq.), produce atomically smooth surfaces. The etched surfaces are terminated by a monolayer of H atoms irrespective of pH. The pH-dependent transition is attributed to two competing multistep reaction pathways. At higher pH, the base-catalyzed formation of a surface silanone leads to the production of smooth surfaces. This reaction channel is suppressed at low pH, leading to the formation of {110}-faceted hillocks by a second reaction. The morphological transition is not affected by dissolved O2 in the etchant." @default.
- W2317899480 created "2016-06-24" @default.
- W2317899480 creator A5007768076 @default.
- W2317899480 creator A5083922871 @default.
- W2317899480 date "2012-10-01" @default.
- W2317899480 modified "2023-09-27" @default.
- W2317899480 title "Si(100) Etching in Aqueous Fluoride Solutions: Parallel Etching Reactions Lead to pH-Dependent Nanohillock Formation or Atomically Flat Surfaces" @default.
- W2317899480 cites W1817304452 @default.
- W2317899480 cites W1964586848 @default.
- W2317899480 cites W1964650066 @default.
- W2317899480 cites W1967916204 @default.
- W2317899480 cites W1972557924 @default.
- W2317899480 cites W1973902558 @default.
- W2317899480 cites W1978119897 @default.
- W2317899480 cites W1980215159 @default.
- W2317899480 cites W1980348793 @default.
- W2317899480 cites W1987246449 @default.
- W2317899480 cites W1989702149 @default.
- W2317899480 cites W2000270691 @default.
- W2317899480 cites W2007972289 @default.
- W2317899480 cites W2007974211 @default.
- W2317899480 cites W2008712026 @default.
- W2317899480 cites W2010096367 @default.
- W2317899480 cites W2010766880 @default.
- W2317899480 cites W2011488302 @default.
- W2317899480 cites W2022265330 @default.
- W2317899480 cites W2028568414 @default.
- W2317899480 cites W2036430827 @default.
- W2317899480 cites W2039335283 @default.
- W2317899480 cites W2045552150 @default.
- W2317899480 cites W2048939859 @default.
- W2317899480 cites W2050520516 @default.
- W2317899480 cites W2050768366 @default.
- W2317899480 cites W2053921393 @default.
- W2317899480 cites W2058849017 @default.
- W2317899480 cites W2062254666 @default.
- W2317899480 cites W2063140846 @default.
- W2317899480 cites W2064889045 @default.
- W2317899480 cites W2065055949 @default.
- W2317899480 cites W2068963186 @default.
- W2317899480 cites W2074676534 @default.
- W2317899480 cites W2075448495 @default.
- W2317899480 cites W2082056395 @default.
- W2317899480 cites W2169330530 @default.
- W2317899480 cites W2334640103 @default.
- W2317899480 cites W2492801752 @default.
- W2317899480 cites W3104062667 @default.
- W2317899480 doi "https://doi.org/10.1021/jp308064s" @default.
- W2317899480 hasPublicationYear "2012" @default.
- W2317899480 type Work @default.
- W2317899480 sameAs 2317899480 @default.
- W2317899480 citedByCount "12" @default.
- W2317899480 countsByYear W23178994802013 @default.
- W2317899480 countsByYear W23178994802015 @default.
- W2317899480 countsByYear W23178994802016 @default.
- W2317899480 countsByYear W23178994802017 @default.
- W2317899480 countsByYear W23178994802018 @default.
- W2317899480 countsByYear W23178994802023 @default.
- W2317899480 crossrefType "journal-article" @default.
- W2317899480 hasAuthorship W2317899480A5007768076 @default.
- W2317899480 hasAuthorship W2317899480A5083922871 @default.
- W2317899480 hasConcept C100460472 @default.
- W2317899480 hasConcept C145148216 @default.
- W2317899480 hasConcept C147789679 @default.
- W2317899480 hasConcept C159985019 @default.
- W2317899480 hasConcept C161790260 @default.
- W2317899480 hasConcept C171250308 @default.
- W2317899480 hasConcept C178790620 @default.
- W2317899480 hasConcept C179104552 @default.
- W2317899480 hasConcept C184651966 @default.
- W2317899480 hasConcept C185592680 @default.
- W2317899480 hasConcept C192562407 @default.
- W2317899480 hasConcept C2779227376 @default.
- W2317899480 hasConcept C2779851234 @default.
- W2317899480 hasConcept C2780828025 @default.
- W2317899480 hasConcept C30095370 @default.
- W2317899480 hasConcept C55493867 @default.
- W2317899480 hasConcept C6322943 @default.
- W2317899480 hasConcept C6518042 @default.
- W2317899480 hasConcept C7070889 @default.
- W2317899480 hasConceptScore W2317899480C100460472 @default.
- W2317899480 hasConceptScore W2317899480C145148216 @default.
- W2317899480 hasConceptScore W2317899480C147789679 @default.
- W2317899480 hasConceptScore W2317899480C159985019 @default.
- W2317899480 hasConceptScore W2317899480C161790260 @default.
- W2317899480 hasConceptScore W2317899480C171250308 @default.
- W2317899480 hasConceptScore W2317899480C178790620 @default.
- W2317899480 hasConceptScore W2317899480C179104552 @default.
- W2317899480 hasConceptScore W2317899480C184651966 @default.
- W2317899480 hasConceptScore W2317899480C185592680 @default.
- W2317899480 hasConceptScore W2317899480C192562407 @default.
- W2317899480 hasConceptScore W2317899480C2779227376 @default.
- W2317899480 hasConceptScore W2317899480C2779851234 @default.
- W2317899480 hasConceptScore W2317899480C2780828025 @default.
- W2317899480 hasConceptScore W2317899480C30095370 @default.
- W2317899480 hasConceptScore W2317899480C55493867 @default.
- W2317899480 hasConceptScore W2317899480C6322943 @default.
- W2317899480 hasConceptScore W2317899480C6518042 @default.