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- W2318338113 abstract "We previously proposed the motional-mode decoupling control scheme for a micro-moving stage with three-degrees-of-freedom. In this control scheme, the acceleration feedback as a minor loop against the position loop was implemented and this minor loop had a role of damping. Since the displacement loop based on the motional-mode was constructed, the same loop structure was also adopted for the acceleration loop. However, there is not much meaning in the structure of motional-mode based damping loop, because the acceleration feedback is implemented to compensate for lack of mechanical damping. Then, it is preferable to adjust the damping for each vibration-mode rather than for each motional-mode. In this paper, we propose a modified decoupling control scheme in which the motional-mode is applied to the position loop and the vibration-mode is applied to the acceleration loop." @default.
- W2318338113 created "2016-06-24" @default.
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- W2318338113 date "2000-01-01" @default.
- W2318338113 modified "2023-10-16" @default.
- W2318338113 title "Positioning of Three-Degrees-of-Freedom Micro-Moving Stage having Vibration-Mode Decoupling Minor Loop." @default.
- W2318338113 doi "https://doi.org/10.1299/kikaic.66.530" @default.
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