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- W2318782968 abstract "A new method of three dimensional (3-D) analysis by Auger electron spectroscopy (AES) is proposed. The 3-D data for a specimen surface layer are compiled by repeating Auger image acquisition and ion sputtering alternatively. Three different techniques for extracting revealing hidden information from the compiled data are shown. 1) Cross-sectional images were constructed by looking at the intensity distribution along a line for each of the stored images. 2) The selected spaces (e. g. grain boundaries) of the 3-D data were quantified. An binary image generated by processing a secondary electron image simultaneously acquired were used to cut out the desired data space as a mask. 3) Depth profiles for the specified area were also constructed. Although 3-D data acquisition takes a long time, the data processed over a wide space shows high reliability, because it is substantially accumulated a large number of data." @default.
- W2318782968 created "2016-06-24" @default.
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- W2318782968 date "1992-01-01" @default.
- W2318782968 modified "2023-09-26" @default.
- W2318782968 title "Three Dimensional Analysis by Auger Electron Spectroscopy." @default.
- W2318782968 doi "https://doi.org/10.1380/jsssj.13.5_279" @default.
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