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- W2318786835 abstract "Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heating mechanisms were found during the E-H-mode transition." @default.
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- W2318786835 date "2014-10-01" @default.
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- W2318786835 title "Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges" @default.
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- W2318786835 doi "https://doi.org/10.1109/tps.2014.2310501" @default.
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