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- W2318974686 abstract "Glass is an excellent amorphous material for its transparency, hardness and electric insulation. Industrial laser processing of glass has been performed mainly in the case of surface marking. Soda lime glass and non-alkali glass were processed by a laser ablation technique to obtain high aspect ratio holes. The 5th harmonic pulse of Nd:YLF laser (λ = 209nm) was used. The laser energy was 40μJ/pulse and the pulse width was 12ns FWHM. When the laser beams were highly focused on the glass, SEM photographs showed no cracks or damages on the surface around the holes. The holes with the diameter of 10μm and the depth of 1 mm were obtained and the aspect ratio of the holes was about 100." @default.
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- W2318974686 date "1997-01-01" @default.
- W2318974686 modified "2023-09-26" @default.
- W2318974686 title "High Aspect Ratio Glass Processing with Using 5th Harmonic Pulse of Nd: YLF Laser." @default.
- W2318974686 doi "https://doi.org/10.2184/lsj.25.790" @default.
- W2318974686 hasPublicationYear "1997" @default.
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