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- W2319134421 abstract "IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters." @default.
- W2319134421 created "2016-06-24" @default.
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- W2319134421 date "2013-01-01" @default.
- W2319134421 modified "2023-10-17" @default.
- W2319134421 title "Post-deposition treatment of IBS coatings for UV applications" @default.
- W2319134421 doi "https://doi.org/10.1364/oic.2013.pmb.10" @default.
- W2319134421 hasPublicationYear "2013" @default.
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