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- W2319339963 endingPage "422005" @default.
- W2319339963 startingPage "422005" @default.
- W2319339963 abstract "The combination of flexure and PZT actuator is a significant method to achieve precision adjustment. A precision adjusting mechanism with flexure hinges was introduced and theoretical calculations were carried out to get the working principle of it. The optimization design and finite element analysis were also taken to acquire the axial stiffness of a typical opto-mechanic structure. The results show that the maximum axial displacement of the optics can be bigger than 200 m under the yield limit of the material. Secondly, a modal analysis is taken to obtain the natural frequency of the mechanism. The results indicated that the first resonant frequency of the structure is 185.1 Hz. It can be seen that the natural frequency can satisfy the work specification of the lithographic lens. At last, the influence of the applied force of the PZT to the surface figure of an optical element was obtained. The result shows that the influence of the force F=14N to the RMS of the optic element is 4.41 nm. All these results provide useful evidences for the applyment of this mechanism for optic adjusting." @default.
- W2319339963 created "2016-06-24" @default.
- W2319339963 creator A5062803332 @default.
- W2319339963 creator A5083985992 @default.
- W2319339963 date "2014-01-01" @default.
- W2319339963 modified "2023-10-16" @default.
- W2319339963 title "Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens" @default.
- W2319339963 doi "https://doi.org/10.3788/gzxb20144304.0422005" @default.
- W2319339963 hasPublicationYear "2014" @default.
- W2319339963 type Work @default.
- W2319339963 sameAs 2319339963 @default.
- W2319339963 citedByCount "0" @default.
- W2319339963 crossrefType "journal-article" @default.
- W2319339963 hasAuthorship W2319339963A5062803332 @default.
- W2319339963 hasAuthorship W2319339963A5083985992 @default.
- W2319339963 hasConcept C120665830 @default.
- W2319339963 hasConcept C121332964 @default.
- W2319339963 hasConcept C15336307 @default.
- W2319339963 hasConcept C192562407 @default.
- W2319339963 hasConcept C204223013 @default.
- W2319339963 hasConcept C41008148 @default.
- W2319339963 hasConcept C62520636 @default.
- W2319339963 hasConcept C89611455 @default.
- W2319339963 hasConceptScore W2319339963C120665830 @default.
- W2319339963 hasConceptScore W2319339963C121332964 @default.
- W2319339963 hasConceptScore W2319339963C15336307 @default.
- W2319339963 hasConceptScore W2319339963C192562407 @default.
- W2319339963 hasConceptScore W2319339963C204223013 @default.
- W2319339963 hasConceptScore W2319339963C41008148 @default.
- W2319339963 hasConceptScore W2319339963C62520636 @default.
- W2319339963 hasConceptScore W2319339963C89611455 @default.
- W2319339963 hasIssue "4" @default.
- W2319339963 hasLocation W23193399631 @default.
- W2319339963 hasOpenAccess W2319339963 @default.
- W2319339963 hasPrimaryLocation W23193399631 @default.
- W2319339963 hasRelatedWork W1981946101 @default.
- W2319339963 hasRelatedWork W2021042472 @default.
- W2319339963 hasRelatedWork W2026059381 @default.
- W2319339963 hasRelatedWork W2074109741 @default.
- W2319339963 hasRelatedWork W2075664069 @default.
- W2319339963 hasRelatedWork W2294687285 @default.
- W2319339963 hasRelatedWork W2359007671 @default.
- W2319339963 hasRelatedWork W2785532878 @default.
- W2319339963 hasRelatedWork W2899084033 @default.
- W2319339963 hasRelatedWork W942427343 @default.
- W2319339963 hasVolume "43" @default.
- W2319339963 isParatext "false" @default.
- W2319339963 isRetracted "false" @default.
- W2319339963 magId "2319339963" @default.
- W2319339963 workType "article" @default.