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- W2319879587 abstract "A vacuum system for the deposition of uniform thin films from a single, small area source without moving parts has been developed. By interposing a stationary tube and baffle of appro-priate dimensions and temperature between the source and substrate, it is possible to deposit films that have thickness uniformities over large substrate areas which heretofore have only been achieved through use of multiple sources and/or moving parts. Thin films of aluminum, copper and gold have been deposited with this system and thickness uniformities of better than ±2% over 14 cm at a source to substrate distance of 25 cm have been observed to date. There are indications that further improvements are possible through optimizations of tube parameters." @default.
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- W2319879587 date "1974-01-01" @default.
- W2319879587 modified "2023-09-26" @default.
- W2319879587 title "Large Area Thin Films of Highly Uniform Thickness Vacuum Deposited in a Stationary System" @default.
- W2319879587 doi "https://doi.org/10.7567/jjaps.2s1.471" @default.
- W2319879587 hasPublicationYear "1974" @default.
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