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• W2319964658 abstract "This paper presents a Fabry-Perot fiber tip sensor based on an air-liquid filled cavity. The cavity is sealed off by a thin gold coated membrane of parylene C, between 300 and 350 nm, creating a particularly flexible diaphragm. In order to retrieve and track the cavity of interest from other cavities formed within the sensor tip, a signal processing of the feedback signal is performed by inverse fast Fourier transform. The experimental sensor has been manufactured and tested for temperature, giving cavity length sensitivities of 6.1 nm/°C and 9.6 nm/°C for temperature increase and decrease respectively. The external gas pressure response gives a sensitivity of 15 nm/kPa. The fiber sensor has also been adapted for force sensing after silicone embedment and has shown a sensitivity of about 8.7 nm/mN. Finally, the sensor has been tested on insertion into a human temporal bone, proving that it could be an interesting candidate for insertion force monitoring for robotic cochlear implantation." @default.
• W2319964658 created "2016-06-24" @default.
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• W2319964658 date "2016-04-05" @default.
• W2319964658 modified "2023-10-02" @default.
• W2319964658 title "Liquid-air based Fabry-Pérot cavity on fiber tip sensor" @default.
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• W2319964658 doi "https://doi.org/10.1364/oe.24.008054" @default.
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