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- W2320224170 endingPage "60" @default.
- W2320224170 startingPage "55" @default.
- W2320224170 abstract "Effect of dielectric charging on the performance of SOI based Capacitive Micromachined Ultrasonic Transducers (CMUT) has been investigated. Measurements on an SOI based CMUT show that that the capacitance change as a function of DC bias is considerably higher than analytically calculated values. Investigation shows that this deviation in capacitance from analytically calculated values is due to the combined effects of different dielectric charging phenomena due to a strong electric field, trap charges in the SOI oxide layer, the charge motion associated with the leakage current through the buried oxide layer, and the air in the CMUT cavity. Additionally, this charging effect degrades the transduction efficiency as the induced polarization reduced the effective bias across the CMUT. It is concluded that the buried oxide (BOX) layers in SOI wafers are not suitable for use as dielectric spacers in electrostatic MEMS devices. Keywords: Capacitance, CMUT, dielectric charging, leakage current, MEMS, microfabrication, SOI." @default.
- W2320224170 created "2016-06-24" @default.
- W2320224170 creator A5033031377 @default.
- W2320224170 creator A5047208692 @default.
- W2320224170 date "2014-09-19" @default.
- W2320224170 modified "2023-10-18" @default.
- W2320224170 title "Effect of Dielectric Charging on Capacitance Change of an SOI Based CMUT" @default.
- W2320224170 doi "https://doi.org/10.2174/187640290601140919144840" @default.
- W2320224170 hasPublicationYear "2014" @default.
- W2320224170 type Work @default.
- W2320224170 sameAs 2320224170 @default.
- W2320224170 citedByCount "4" @default.
- W2320224170 countsByYear W23202241702015 @default.
- W2320224170 countsByYear W23202241702019 @default.
- W2320224170 countsByYear W23202241702020 @default.
- W2320224170 crossrefType "journal-article" @default.
- W2320224170 hasAuthorship W2320224170A5033031377 @default.
- W2320224170 hasAuthorship W2320224170A5047208692 @default.
- W2320224170 hasConcept C100082104 @default.
- W2320224170 hasConcept C119599485 @default.
- W2320224170 hasConcept C127413603 @default.
- W2320224170 hasConcept C133386390 @default.
- W2320224170 hasConcept C147789679 @default.
- W2320224170 hasConcept C159985019 @default.
- W2320224170 hasConcept C160671074 @default.
- W2320224170 hasConcept C17525397 @default.
- W2320224170 hasConcept C185592680 @default.
- W2320224170 hasConcept C192562407 @default.
- W2320224170 hasConcept C206755178 @default.
- W2320224170 hasConcept C30066665 @default.
- W2320224170 hasConcept C37977207 @default.
- W2320224170 hasConcept C49040817 @default.
- W2320224170 hasConcept C53143962 @default.
- W2320224170 hasConcept C544956773 @default.
- W2320224170 hasConcept C58772458 @default.
- W2320224170 hasConceptScore W2320224170C100082104 @default.
- W2320224170 hasConceptScore W2320224170C119599485 @default.
- W2320224170 hasConceptScore W2320224170C127413603 @default.
- W2320224170 hasConceptScore W2320224170C133386390 @default.
- W2320224170 hasConceptScore W2320224170C147789679 @default.
- W2320224170 hasConceptScore W2320224170C159985019 @default.
- W2320224170 hasConceptScore W2320224170C160671074 @default.
- W2320224170 hasConceptScore W2320224170C17525397 @default.
- W2320224170 hasConceptScore W2320224170C185592680 @default.
- W2320224170 hasConceptScore W2320224170C192562407 @default.
- W2320224170 hasConceptScore W2320224170C206755178 @default.
- W2320224170 hasConceptScore W2320224170C30066665 @default.
- W2320224170 hasConceptScore W2320224170C37977207 @default.
- W2320224170 hasConceptScore W2320224170C49040817 @default.
- W2320224170 hasConceptScore W2320224170C53143962 @default.
- W2320224170 hasConceptScore W2320224170C544956773 @default.
- W2320224170 hasConceptScore W2320224170C58772458 @default.
- W2320224170 hasIssue "1" @default.
- W2320224170 hasLocation W23202241701 @default.
- W2320224170 hasOpenAccess W2320224170 @default.
- W2320224170 hasPrimaryLocation W23202241701 @default.
- W2320224170 hasRelatedWork W1528806418 @default.
- W2320224170 hasRelatedWork W1546777811 @default.
- W2320224170 hasRelatedWork W1844707803 @default.
- W2320224170 hasRelatedWork W1978321864 @default.
- W2320224170 hasRelatedWork W2066441478 @default.
- W2320224170 hasRelatedWork W2146697498 @default.
- W2320224170 hasRelatedWork W2161377943 @default.
- W2320224170 hasRelatedWork W2344710050 @default.
- W2320224170 hasRelatedWork W2375552147 @default.
- W2320224170 hasRelatedWork W2911329264 @default.
- W2320224170 hasVolume "6" @default.
- W2320224170 isParatext "false" @default.
- W2320224170 isRetracted "false" @default.
- W2320224170 magId "2320224170" @default.
- W2320224170 workType "article" @default.