Matches in SemOpenAlex for { <https://semopenalex.org/work/W2320550360> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2320550360 endingPage "108" @default.
- W2320550360 startingPage "97" @default.
- W2320550360 abstract "Materials analysis problems often demand site-specific preparation at sub µm scale and element analysis at nm scale. Focused ion beam instruments and field emission transmission electron microscopes are instruments offering appropriate methods. This contribution features different applications: We show how EDX/EELS investigations help to understand the mechanism and the different stages of worm corrosion encountered during the manufacturing of aluminum interconnects. We present calibration data suitable for the quantitative determination of Ge in SiGe material by EFTEM/ESI at sub 10 nm scale. We describe a 3D defect analysis technique for silicon devices which combines defect localization in thick plan-view samples by 400 kV TEM with subsequent FIB cross-sectioning of the plan-view specimen. We demonstrate the application of FIB tomography to the characterization of delaminations at a chip / molding compound interface." @default.
- W2320550360 created "2016-06-24" @default.
- W2320550360 creator A5060981060 @default.
- W2320550360 creator A5066468784 @default.
- W2320550360 date "2019-12-19" @default.
- W2320550360 modified "2023-09-25" @default.
- W2320550360 title "Application of Selected Electron Microscopy Methods to Materials Analysis Problems" @default.
- W2320550360 doi "https://doi.org/10.1149/1.2773980" @default.
- W2320550360 hasPublicationYear "2019" @default.
- W2320550360 type Work @default.
- W2320550360 sameAs 2320550360 @default.
- W2320550360 citedByCount "1" @default.
- W2320550360 crossrefType "journal-article" @default.
- W2320550360 hasAuthorship W2320550360A5060981060 @default.
- W2320550360 hasAuthorship W2320550360A5066468784 @default.
- W2320550360 hasConcept C120665830 @default.
- W2320550360 hasConcept C121332964 @default.
- W2320550360 hasConcept C145148216 @default.
- W2320550360 hasConcept C146088050 @default.
- W2320550360 hasConcept C161866238 @default.
- W2320550360 hasConcept C171250308 @default.
- W2320550360 hasConcept C178790620 @default.
- W2320550360 hasConcept C185592680 @default.
- W2320550360 hasConcept C192562407 @default.
- W2320550360 hasConcept C193016168 @default.
- W2320550360 hasConcept C2780841128 @default.
- W2320550360 hasConcept C49040817 @default.
- W2320550360 hasConcept C544956773 @default.
- W2320550360 hasConcept C75806775 @default.
- W2320550360 hasConcept C93877712 @default.
- W2320550360 hasConceptScore W2320550360C120665830 @default.
- W2320550360 hasConceptScore W2320550360C121332964 @default.
- W2320550360 hasConceptScore W2320550360C145148216 @default.
- W2320550360 hasConceptScore W2320550360C146088050 @default.
- W2320550360 hasConceptScore W2320550360C161866238 @default.
- W2320550360 hasConceptScore W2320550360C171250308 @default.
- W2320550360 hasConceptScore W2320550360C178790620 @default.
- W2320550360 hasConceptScore W2320550360C185592680 @default.
- W2320550360 hasConceptScore W2320550360C192562407 @default.
- W2320550360 hasConceptScore W2320550360C193016168 @default.
- W2320550360 hasConceptScore W2320550360C2780841128 @default.
- W2320550360 hasConceptScore W2320550360C49040817 @default.
- W2320550360 hasConceptScore W2320550360C544956773 @default.
- W2320550360 hasConceptScore W2320550360C75806775 @default.
- W2320550360 hasConceptScore W2320550360C93877712 @default.
- W2320550360 hasIssue "1" @default.
- W2320550360 hasLocation W23205503601 @default.
- W2320550360 hasOpenAccess W2320550360 @default.
- W2320550360 hasPrimaryLocation W23205503601 @default.
- W2320550360 hasRelatedWork W154570863 @default.
- W2320550360 hasRelatedWork W1992364123 @default.
- W2320550360 hasRelatedWork W2025646587 @default.
- W2320550360 hasRelatedWork W2124887299 @default.
- W2320550360 hasRelatedWork W2929128803 @default.
- W2320550360 hasRelatedWork W2955051483 @default.
- W2320550360 hasRelatedWork W4220758356 @default.
- W2320550360 hasRelatedWork W4251774438 @default.
- W2320550360 hasRelatedWork W4281789762 @default.
- W2320550360 hasRelatedWork W2498368075 @default.
- W2320550360 hasVolume "10" @default.
- W2320550360 isParatext "false" @default.
- W2320550360 isRetracted "false" @default.
- W2320550360 magId "2320550360" @default.
- W2320550360 workType "article" @default.