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• W2321350810 abstract "Si clusters formed in silane discharge plasmas are mainly responsible for light induced degradation of hydrogenated amorphous Si (a-Si:H) thin films deposited by the plasmas. Here we have investigated effects of grid DC bias on incorporation amount of Si clusters into a-Si:H films in multi-hollow discharge plasma CVD reactor using quartz crystal microbalances, by which volume fraction of Si clusters in deposited films is quantitatively measured. When the grid potential is lower than plasma potential, the negatively charged clusters are repelled away from the grid by electrostatic force, resulting in lower volume fraction." @default.
• W2321350810 created "2016-06-24" @default.
• W2321350810 creator A5004048058 @default.
• W2321350810 creator A5010321399 @default.
• W2321350810 creator A5026098035 @default.
• W2321350810 creator A5026479478 @default.
• W2321350810 creator A5061364763 @default.
• W2321350810 creator A5072580776 @default.
• W2321350810 creator A5074647843 @default.
• W2321350810 creator A5079413858 @default.
• W2321350810 creator A5083610808 @default.
• W2321350810 creator A5084906587 @default.
• W2321350810 date "2014-03-19" @default.
• W2321350810 modified "2023-09-24" @default.
• W2321350810 title "Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD" @default.
• W2321350810 cites W1966985939 @default.
• W2321350810 cites W1969345887 @default.
• W2321350810 cites W1976802228 @default.
• W2321350810 cites W1985335054 @default.
• W2321350810 cites W1986898324 @default.
• W2321350810 cites W2024002720 @default.
• W2321350810 cites W2024371032 @default.
• W2321350810 cites W2040438812 @default.
• W2321350810 cites W2049160995 @default.
• W2321350810 cites W2055077468 @default.
• W2321350810 cites W2069462184 @default.
• W2321350810 cites W2082557116 @default.
• W2321350810 cites W2093125407 @default.
• W2321350810 cites W1973030205 @default.
• W2321350810 doi "https://doi.org/10.7566/jpscp.1.015069" @default.
• W2321350810 hasPublicationYear "2014" @default.
• W2321350810 type Work @default.
• W2321350810 sameAs 2321350810 @default.
• W2321350810 citedByCount "0" @default.
• W2321350810 crossrefType "proceedings-article" @default.
• W2321350810 hasAuthorship W2321350810A5004048058 @default.
• W2321350810 hasAuthorship W2321350810A5010321399 @default.
• W2321350810 hasAuthorship W2321350810A5026098035 @default.
• W2321350810 hasAuthorship W2321350810A5026479478 @default.
• W2321350810 hasAuthorship W2321350810A5061364763 @default.
• W2321350810 hasAuthorship W2321350810A5072580776 @default.
• W2321350810 hasAuthorship W2321350810A5074647843 @default.
• W2321350810 hasAuthorship W2321350810A5079413858 @default.
• W2321350810 hasAuthorship W2321350810A5083610808 @default.
• W2321350810 hasAuthorship W2321350810A5084906587 @default.
• W2321350810 hasConcept C113196181 @default.
• W2321350810 hasConcept C121332964 @default.
• W2321350810 hasConcept C127413603 @default.
• W2321350810 hasConcept C159985019 @default.
• W2321350810 hasConcept C171250308 @default.
• W2321350810 hasConcept C176118016 @default.
• W2321350810 hasConcept C185592680 @default.
• W2321350810 hasConcept C19067145 @default.
• W2321350810 hasConcept C192562407 @default.
• W2321350810 hasConcept C199360897 @default.
• W2321350810 hasConcept C2776390347 @default.
• W2321350810 hasConcept C2778024649 @default.
• W2321350810 hasConcept C2779667780 @default.
• W2321350810 hasConcept C2779870107 @default.
• W2321350810 hasConcept C2781285689 @default.
• W2321350810 hasConcept C41008148 @default.
• W2321350810 hasConcept C42360764 @default.
• W2321350810 hasConcept C43503373 @default.
• W2321350810 hasConcept C43617362 @default.
• W2321350810 hasConcept C49040817 @default.
• W2321350810 hasConcept C544956773 @default.
• W2321350810 hasConcept C56052488 @default.
• W2321350810 hasConcept C60581705 @default.
• W2321350810 hasConcept C62520636 @default.
• W2321350810 hasConcept C65590680 @default.
• W2321350810 hasConcept C8010536 @default.
• W2321350810 hasConcept C82706917 @default.
• W2321350810 hasConceptScore W2321350810C113196181 @default.
• W2321350810 hasConceptScore W2321350810C121332964 @default.
• W2321350810 hasConceptScore W2321350810C127413603 @default.
• W2321350810 hasConceptScore W2321350810C159985019 @default.
• W2321350810 hasConceptScore W2321350810C171250308 @default.
• W2321350810 hasConceptScore W2321350810C176118016 @default.
• W2321350810 hasConceptScore W2321350810C185592680 @default.
• W2321350810 hasConceptScore W2321350810C19067145 @default.
• W2321350810 hasConceptScore W2321350810C192562407 @default.
• W2321350810 hasConceptScore W2321350810C199360897 @default.
• W2321350810 hasConceptScore W2321350810C2776390347 @default.
• W2321350810 hasConceptScore W2321350810C2778024649 @default.
• W2321350810 hasConceptScore W2321350810C2779667780 @default.
• W2321350810 hasConceptScore W2321350810C2779870107 @default.
• W2321350810 hasConceptScore W2321350810C2781285689 @default.
• W2321350810 hasConceptScore W2321350810C41008148 @default.
• W2321350810 hasConceptScore W2321350810C42360764 @default.
• W2321350810 hasConceptScore W2321350810C43503373 @default.
• W2321350810 hasConceptScore W2321350810C43617362 @default.
• W2321350810 hasConceptScore W2321350810C49040817 @default.
• W2321350810 hasConceptScore W2321350810C544956773 @default.
• W2321350810 hasConceptScore W2321350810C56052488 @default.
• W2321350810 hasConceptScore W2321350810C60581705 @default.
• W2321350810 hasConceptScore W2321350810C62520636 @default.
• W2321350810 hasConceptScore W2321350810C65590680 @default.
• W2321350810 hasConceptScore W2321350810C8010536 @default.
• W2321350810 hasConceptScore W2321350810C82706917 @default.
• W2321350810 hasLocation W23213508101 @default.

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