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- W2321466168 abstract "The sub-micron damascene interconnects, electromigration is mainly due to the diffusion at the interfaces of Cu with liner or dielectric capping layer. Many reports have shown that Cu/capping dielectric is the dominant interface. Experiments were performed to study the effect of the interfacial conditions of Cu/capping dielectric material on electromigration for narrow and wide Cu lines. The results revealed significant differences in electromigration behavior of via-fed upper and lower layer damascene test structures. For upper layer test structure, the capping layer and plasma surface treatment significantly dominated EM performance for different line width structures. In the case of lower layer test structure, the electromigration time to failure was found to be influenced by the capping layer and via process, and it remained unaffected by the plasma surface treatment for the narrow Cu line. For the wide line width (3 X ), electromigration performance was influenced by the current crowding on via-bottom." @default.
- W2321466168 created "2016-06-24" @default.
- W2321466168 creator A5016780362 @default.
- W2321466168 creator A5081770274 @default.
- W2321466168 date "2008-05-01" @default.
- W2321466168 modified "2023-09-25" @default.
- W2321466168 title "Effect of Interfacial Condition on Electromigration for Narrow and Wide Copper Interconnects" @default.
- W2321466168 doi "https://doi.org/10.1166/jnn.2008.573" @default.
- W2321466168 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/18572672" @default.
- W2321466168 hasPublicationYear "2008" @default.
- W2321466168 type Work @default.
- W2321466168 sameAs 2321466168 @default.
- W2321466168 citedByCount "3" @default.
- W2321466168 countsByYear W23214661682017 @default.
- W2321466168 crossrefType "journal-article" @default.
- W2321466168 hasAuthorship W2321466168A5016780362 @default.
- W2321466168 hasAuthorship W2321466168A5081770274 @default.
- W2321466168 hasConcept C115900370 @default.
- W2321466168 hasConcept C116372231 @default.
- W2321466168 hasConcept C120665830 @default.
- W2321466168 hasConcept C121332964 @default.
- W2321466168 hasConcept C133386390 @default.
- W2321466168 hasConcept C138055206 @default.
- W2321466168 hasConcept C159985019 @default.
- W2321466168 hasConcept C191897082 @default.
- W2321466168 hasConcept C192562407 @default.
- W2321466168 hasConcept C207740977 @default.
- W2321466168 hasConcept C2779227376 @default.
- W2321466168 hasConcept C3017524520 @default.
- W2321466168 hasConcept C49040817 @default.
- W2321466168 hasConcept C544778455 @default.
- W2321466168 hasConcept C62520636 @default.
- W2321466168 hasConcept C69357855 @default.
- W2321466168 hasConcept C97355855 @default.
- W2321466168 hasConceptScore W2321466168C115900370 @default.
- W2321466168 hasConceptScore W2321466168C116372231 @default.
- W2321466168 hasConceptScore W2321466168C120665830 @default.
- W2321466168 hasConceptScore W2321466168C121332964 @default.
- W2321466168 hasConceptScore W2321466168C133386390 @default.
- W2321466168 hasConceptScore W2321466168C138055206 @default.
- W2321466168 hasConceptScore W2321466168C159985019 @default.
- W2321466168 hasConceptScore W2321466168C191897082 @default.
- W2321466168 hasConceptScore W2321466168C192562407 @default.
- W2321466168 hasConceptScore W2321466168C207740977 @default.
- W2321466168 hasConceptScore W2321466168C2779227376 @default.
- W2321466168 hasConceptScore W2321466168C3017524520 @default.
- W2321466168 hasConceptScore W2321466168C49040817 @default.
- W2321466168 hasConceptScore W2321466168C544778455 @default.
- W2321466168 hasConceptScore W2321466168C62520636 @default.
- W2321466168 hasConceptScore W2321466168C69357855 @default.
- W2321466168 hasConceptScore W2321466168C97355855 @default.
- W2321466168 hasLocation W23214661681 @default.
- W2321466168 hasLocation W23214661682 @default.
- W2321466168 hasOpenAccess W2321466168 @default.
- W2321466168 hasPrimaryLocation W23214661681 @default.
- W2321466168 hasRelatedWork W1553602795 @default.
- W2321466168 hasRelatedWork W1569829109 @default.
- W2321466168 hasRelatedWork W1971983657 @default.
- W2321466168 hasRelatedWork W1976036431 @default.
- W2321466168 hasRelatedWork W1978728256 @default.
- W2321466168 hasRelatedWork W1979429199 @default.
- W2321466168 hasRelatedWork W1979695555 @default.
- W2321466168 hasRelatedWork W1990047641 @default.
- W2321466168 hasRelatedWork W1994300991 @default.
- W2321466168 hasRelatedWork W2015774673 @default.
- W2321466168 hasRelatedWork W2016006114 @default.
- W2321466168 hasRelatedWork W2020574678 @default.
- W2321466168 hasRelatedWork W2034510649 @default.
- W2321466168 hasRelatedWork W2082831914 @default.
- W2321466168 hasRelatedWork W2083234109 @default.
- W2321466168 hasRelatedWork W2092237910 @default.
- W2321466168 hasRelatedWork W2106410063 @default.
- W2321466168 hasRelatedWork W2132762933 @default.
- W2321466168 hasRelatedWork W2258648545 @default.
- W2321466168 hasRelatedWork W3189973866 @default.
- W2321466168 isParatext "false" @default.
- W2321466168 isRetracted "false" @default.
- W2321466168 magId "2321466168" @default.
- W2321466168 workType "article" @default.