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- W2321532906 abstract "Discharge excited high repetition-rate excimer lasers will be useful to the material process of a next generation. In this paper, the technologies for the discharge excited high repetition-rate excimer lasers including gas circulation system, magnetic pulse compressor, pre-ionizer and gas recycling system, are discussed. We wish to report a high power KrF excimer laser with a new capacitor-transfer-type configuration, which delivered an average power of 150W at a high efficiency of-3.8% and a high repetition-rate of 700Hz." @default.
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- W2321532906 date "1988-01-01" @default.
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- W2321532906 title "Discharge excited high-repetition-rate excimer lasers." @default.
- W2321532906 doi "https://doi.org/10.2184/lsj.16.191" @default.
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