Matches in SemOpenAlex for { <https://semopenalex.org/work/W2321565572> ?p ?o ?g. }
- W2321565572 abstract "In thin film technology, future semiconductor and display products with high performance, high density, large area, and ultra high definition with three-dimensional functionalities require high performance thin film transistors (TFTs) with high stability. Zinc oxynitride, a composite of zinc oxide and zinc nitride, has been conceded as a strong substitute to conventional semiconductor film such as silicon and indium gallium zinc oxide due to high mobility value. However, zinc oxynitride has been suffered from poor reproducibility due to relatively low binding energy of nitrogen with zinc, resulting in the instability of composition and its device performance. Here we performed post argon plasma process on zinc oxynitride film, forming nano-crystalline structure in stable amorphous matrix which hampers the reaction of oxygen with zinc. Therefore, material properties and device performance of zinc oxynitride are greatly enhanced, exhibiting robust compositional stability even exposure to air, uniform phase, high electron mobility, negligible fast transient charging and low noise characteristics. Furthermore, We expect high mobility and high stability zinc oxynitride customized by plasma process to be applicable to a broad range of semiconductor and display devices." @default.
- W2321565572 created "2016-06-24" @default.
- W2321565572 creator A5012339735 @default.
- W2321565572 creator A5029046108 @default.
- W2321565572 creator A5039985056 @default.
- W2321565572 creator A5041726376 @default.
- W2321565572 creator A5069117842 @default.
- W2321565572 creator A5084473082 @default.
- W2321565572 date "2016-04-05" @default.
- W2321565572 modified "2023-10-01" @default.
- W2321565572 title "High mobility and high stability glassy metal-oxynitride materials and devices" @default.
- W2321565572 cites W1508716599 @default.
- W2321565572 cites W1749851596 @default.
- W2321565572 cites W1858480979 @default.
- W2321565572 cites W1877908080 @default.
- W2321565572 cites W1911961130 @default.
- W2321565572 cites W1966909270 @default.
- W2321565572 cites W1970217088 @default.
- W2321565572 cites W1972422303 @default.
- W2321565572 cites W1975173121 @default.
- W2321565572 cites W1976305461 @default.
- W2321565572 cites W1979254829 @default.
- W2321565572 cites W1984797780 @default.
- W2321565572 cites W1985692567 @default.
- W2321565572 cites W1994277498 @default.
- W2321565572 cites W1998901581 @default.
- W2321565572 cites W1999589524 @default.
- W2321565572 cites W2003443718 @default.
- W2321565572 cites W2004254158 @default.
- W2321565572 cites W2009146967 @default.
- W2321565572 cites W2012391450 @default.
- W2321565572 cites W2019557326 @default.
- W2321565572 cites W2024413189 @default.
- W2321565572 cites W2028142138 @default.
- W2321565572 cites W2031883084 @default.
- W2321565572 cites W2051470305 @default.
- W2321565572 cites W2052599521 @default.
- W2321565572 cites W2055891464 @default.
- W2321565572 cites W2056976240 @default.
- W2321565572 cites W2062808336 @default.
- W2321565572 cites W2064011317 @default.
- W2321565572 cites W2066829328 @default.
- W2321565572 cites W2067229376 @default.
- W2321565572 cites W2069010267 @default.
- W2321565572 cites W2074512362 @default.
- W2321565572 cites W2094500548 @default.
- W2321565572 cites W2099779584 @default.
- W2321565572 cites W2113616474 @default.
- W2321565572 cites W2118240169 @default.
- W2321565572 cites W2125444603 @default.
- W2321565572 cites W2128428769 @default.
- W2321565572 cites W2131716975 @default.
- W2321565572 cites W2137944730 @default.
- W2321565572 cites W2156933657 @default.
- W2321565572 cites W2162768893 @default.
- W2321565572 cites W2163649411 @default.
- W2321565572 cites W2169865981 @default.
- W2321565572 cites W2315349899 @default.
- W2321565572 cites W2318669650 @default.
- W2321565572 cites W593986804 @default.
- W2321565572 doi "https://doi.org/10.1038/srep23940" @default.
- W2321565572 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4820723" @default.
- W2321565572 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/27044371" @default.
- W2321565572 hasPublicationYear "2016" @default.
- W2321565572 type Work @default.
- W2321565572 sameAs 2321565572 @default.
- W2321565572 citedByCount "24" @default.
- W2321565572 countsByYear W23215655722016 @default.
- W2321565572 countsByYear W23215655722017 @default.
- W2321565572 countsByYear W23215655722018 @default.
- W2321565572 countsByYear W23215655722019 @default.
- W2321565572 countsByYear W23215655722020 @default.
- W2321565572 countsByYear W23215655722021 @default.
- W2321565572 countsByYear W23215655722022 @default.
- W2321565572 countsByYear W23215655722023 @default.
- W2321565572 crossrefType "journal-article" @default.
- W2321565572 hasAuthorship W2321565572A5012339735 @default.
- W2321565572 hasAuthorship W2321565572A5029046108 @default.
- W2321565572 hasAuthorship W2321565572A5039985056 @default.
- W2321565572 hasAuthorship W2321565572A5041726376 @default.
- W2321565572 hasAuthorship W2321565572A5069117842 @default.
- W2321565572 hasAuthorship W2321565572A5084473082 @default.
- W2321565572 hasBestOaLocation W23215655721 @default.
- W2321565572 hasConcept C171250308 @default.
- W2321565572 hasConcept C185592680 @default.
- W2321565572 hasConcept C191897082 @default.
- W2321565572 hasConcept C192562407 @default.
- W2321565572 hasConcept C2777431650 @default.
- W2321565572 hasConcept C2779227376 @default.
- W2321565572 hasConcept C2779476251 @default.
- W2321565572 hasConcept C49040817 @default.
- W2321565572 hasConcept C535196362 @default.
- W2321565572 hasConcept C543292547 @default.
- W2321565572 hasConcept C544956773 @default.
- W2321565572 hasConcept C56052488 @default.
- W2321565572 hasConcept C8010536 @default.
- W2321565572 hasConcept C87359718 @default.
- W2321565572 hasConceptScore W2321565572C171250308 @default.
- W2321565572 hasConceptScore W2321565572C185592680 @default.
- W2321565572 hasConceptScore W2321565572C191897082 @default.