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• W2321678185 abstract "Inductively coupled plasma (ICP) represents a source of charged as well as neutral reactive particles. Plasma created in sulfur dioxide (SO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ) gas is a source of SO radicals suitable for functionalization of delicate organic materials with SO groups, provided the appropriate discharge mode is chosen. The ICP was sustained in either Eor H-mode. In the first case, the plasma glow is rather uniform along the entire reactor and the color is dark blue due to extensive radiation originating from excited SO radicals. In the H-mode, the light intensity is orders of magnitude larger in the coil, and the image is white due to various atomic transitions in the entire spectrum. The plasma density in the H-mode is, therefore, large enough to cause not only dissociation of SO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> to SO but also destruction of SO radicals to S and O atoms, so plasma created in H-mode is not that suitable for functionalization of organic materials with SO groups." @default.
• W2321678185 created "2016-06-24" @default.
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• W2321678185 date "2014-10-01" @default.
• W2321678185 modified "2023-09-24" @default.
• W2321678185 title "E and H Modes of Inductively Coupled SO₂ Plasma" @default.
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• W2321678185 doi "https://doi.org/10.1109/tps.2014.2329499" @default.
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