Matches in SemOpenAlex for { <https://semopenalex.org/work/W2321824602> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2321824602 endingPage "220" @default.
- W2321824602 startingPage "209" @default.
- W2321824602 abstract "A new method for accurate in-depth analysis is developed. Since the ion beam is rapidly scanned with triangle waves, a sample surface is evenly etched in a very short time. In this case, the frequency of the triangle wave which is fed to the x-deflector is slightly different from that to the y-deflector and the ratio of these frequencies is held constant. The mass spectrometer can be scanned during ion beam scanning because one-frame scanning time of the ion beam is much shorter than one-peak scanning time of the mass spectrometer. Consequently, concentration profiles of several elements are obtained in one measurement without spoiling the accuracy of in-depth analysis. The accuracy of in-depth analysis by this method is 100A against 5000A depth. This value is 8 times smaller than that obtained by conventional ion-beam stopping method. Although ion-etched surface are observed with a scanning electron microscope, a roughness gauge and an optical microscope, unevenness is not identified. This method is applied to practical analyses, i. e. in-depth analyses of aluminum oxide deposited on silicon wafer, copper-diffused gallium arsenide and Se-Te-As compound. The result shows superiority of this method to a conventional one." @default.
- W2321824602 created "2016-06-24" @default.
- W2321824602 creator A5009357239 @default.
- W2321824602 creator A5090289463 @default.
- W2321824602 date "1975-01-01" @default.
- W2321824602 modified "2023-09-26" @default.
- W2321824602 title "In-depth Analysis of Solid Surface by High Speed Ion Beam Scanning Method" @default.
- W2321824602 doi "https://doi.org/10.5702/massspec1953.23.209" @default.
- W2321824602 hasPublicationYear "1975" @default.
- W2321824602 type Work @default.
- W2321824602 sameAs 2321824602 @default.
- W2321824602 citedByCount "0" @default.
- W2321824602 crossrefType "journal-article" @default.
- W2321824602 hasAuthorship W2321824602A5009357239 @default.
- W2321824602 hasAuthorship W2321824602A5090289463 @default.
- W2321824602 hasBestOaLocation W23218246021 @default.
- W2321824602 hasConcept C113196181 @default.
- W2321824602 hasConcept C120665830 @default.
- W2321824602 hasConcept C121332964 @default.
- W2321824602 hasConcept C145148216 @default.
- W2321824602 hasConcept C159467904 @default.
- W2321824602 hasConcept C161866238 @default.
- W2321824602 hasConcept C168834538 @default.
- W2321824602 hasConcept C16979985 @default.
- W2321824602 hasConcept C178790620 @default.
- W2321824602 hasConcept C185592680 @default.
- W2321824602 hasConcept C192562407 @default.
- W2321824602 hasConcept C2524010 @default.
- W2321824602 hasConcept C2776799497 @default.
- W2321824602 hasConcept C2994054872 @default.
- W2321824602 hasConcept C33923547 @default.
- W2321824602 hasConcept C43617362 @default.
- W2321824602 hasConcept C50774322 @default.
- W2321824602 hasConceptScore W2321824602C113196181 @default.
- W2321824602 hasConceptScore W2321824602C120665830 @default.
- W2321824602 hasConceptScore W2321824602C121332964 @default.
- W2321824602 hasConceptScore W2321824602C145148216 @default.
- W2321824602 hasConceptScore W2321824602C159467904 @default.
- W2321824602 hasConceptScore W2321824602C161866238 @default.
- W2321824602 hasConceptScore W2321824602C168834538 @default.
- W2321824602 hasConceptScore W2321824602C16979985 @default.
- W2321824602 hasConceptScore W2321824602C178790620 @default.
- W2321824602 hasConceptScore W2321824602C185592680 @default.
- W2321824602 hasConceptScore W2321824602C192562407 @default.
- W2321824602 hasConceptScore W2321824602C2524010 @default.
- W2321824602 hasConceptScore W2321824602C2776799497 @default.
- W2321824602 hasConceptScore W2321824602C2994054872 @default.
- W2321824602 hasConceptScore W2321824602C33923547 @default.
- W2321824602 hasConceptScore W2321824602C43617362 @default.
- W2321824602 hasConceptScore W2321824602C50774322 @default.
- W2321824602 hasIssue "3" @default.
- W2321824602 hasLocation W23218246021 @default.
- W2321824602 hasOpenAccess W2321824602 @default.
- W2321824602 hasPrimaryLocation W23218246021 @default.
- W2321824602 hasRelatedWork W1963346894 @default.
- W2321824602 hasRelatedWork W1993107158 @default.
- W2321824602 hasRelatedWork W2001889668 @default.
- W2321824602 hasRelatedWork W2073133358 @default.
- W2321824602 hasRelatedWork W2074311450 @default.
- W2321824602 hasRelatedWork W2169603408 @default.
- W2321824602 hasRelatedWork W2333796925 @default.
- W2321824602 hasRelatedWork W2335071009 @default.
- W2321824602 hasRelatedWork W3142267622 @default.
- W2321824602 hasRelatedWork W70654245 @default.
- W2321824602 hasVolume "23" @default.
- W2321824602 isParatext "false" @default.
- W2321824602 isRetracted "false" @default.
- W2321824602 magId "2321824602" @default.
- W2321824602 workType "article" @default.