Matches in SemOpenAlex for { <https://semopenalex.org/work/W2321834993> ?p ?o ?g. }
- W2321834993 endingPage "5169" @default.
- W2321834993 startingPage "5163" @default.
- W2321834993 abstract "The chemical properties of titanium nitride−carbide (TiNC) and titanium nitride (TiN) films deposited on silicon are investigated comparatively, showing that the surface reactivity of nitride-based films can be modified precisely and reversibly by controlling the surface elemental composition. These materials are used as diffusion barrier films, and therefore understanding their surface chemistry is key for controlling further deposition steps during interconnect metallization. Chemical vapor deposition (CVD) using Ti[N(CH3)2]4 leads to the formation of TiNC, and nitridation of this film through postannealing under NH3 decreases significantly the carbon content on the surface, leaving essentially a TiN surface, as characterized through the use of spectroscopic, depth-profiling, and microscopic techniques. As determined by the temperature-programmed desorption (TPD) studies of ethylene (carbidization reagent) and dimethylamine (decomposition product of the deposition precursor), the TiN surface is more reactive toward these compounds than the original TiNC film. The role of carbon as a surface reactivity modifier is explained by its ability to decrease the acidity of Ti surface atoms. Moreover, the test reaction of ethylene on the TiN surface is accompanied by a decomposition process that progressively incorporates carbon onto the surface, reducing the surface reactivity to the point where it resembles that of the starting TiNC film. The ability to control the reactivity of a deposited film offers unique opportunities in designing chemical modification schemes for a successful deposition onto these barrier films." @default.
- W2321834993 created "2016-06-24" @default.
- W2321834993 creator A5002260462 @default.
- W2321834993 creator A5020625982 @default.
- W2321834993 creator A5063685864 @default.
- W2321834993 creator A5065843104 @default.
- W2321834993 creator A5081647094 @default.
- W2321834993 date "2009-10-07" @default.
- W2321834993 modified "2023-10-18" @default.
- W2321834993 title "Reversible Tuning of the Surface Chemical Reactivity of Titanium Nitride and Nitride−Carbide Diffusion Barrier Thin Films" @default.
- W2321834993 cites W1536732470 @default.
- W2321834993 cites W1971572800 @default.
- W2321834993 cites W1976749413 @default.
- W2321834993 cites W1977072657 @default.
- W2321834993 cites W1980794170 @default.
- W2321834993 cites W1982893869 @default.
- W2321834993 cites W1986410144 @default.
- W2321834993 cites W1986754274 @default.
- W2321834993 cites W1987741610 @default.
- W2321834993 cites W1995021817 @default.
- W2321834993 cites W1996030118 @default.
- W2321834993 cites W1999233351 @default.
- W2321834993 cites W1999517791 @default.
- W2321834993 cites W2000251599 @default.
- W2321834993 cites W2005687289 @default.
- W2321834993 cites W2012628852 @default.
- W2321834993 cites W2012697188 @default.
- W2321834993 cites W2013902305 @default.
- W2321834993 cites W2017287929 @default.
- W2321834993 cites W2018889213 @default.
- W2321834993 cites W2021464115 @default.
- W2321834993 cites W2022180449 @default.
- W2321834993 cites W2027419934 @default.
- W2321834993 cites W2031309111 @default.
- W2321834993 cites W2038176571 @default.
- W2321834993 cites W2044923391 @default.
- W2321834993 cites W2047496511 @default.
- W2321834993 cites W2049532449 @default.
- W2321834993 cites W2051657502 @default.
- W2321834993 cites W2057381399 @default.
- W2321834993 cites W2065123257 @default.
- W2321834993 cites W2066213748 @default.
- W2321834993 cites W2066649429 @default.
- W2321834993 cites W2066683734 @default.
- W2321834993 cites W2067455431 @default.
- W2321834993 cites W2067629513 @default.
- W2321834993 cites W2070653146 @default.
- W2321834993 cites W2073511409 @default.
- W2321834993 cites W2073973192 @default.
- W2321834993 cites W2074905782 @default.
- W2321834993 cites W2075372342 @default.
- W2321834993 cites W2075623037 @default.
- W2321834993 cites W2079289690 @default.
- W2321834993 cites W2082010484 @default.
- W2321834993 cites W2090669977 @default.
- W2321834993 cites W2094798822 @default.
- W2321834993 cites W2095293442 @default.
- W2321834993 cites W2097519464 @default.
- W2321834993 cites W2102115393 @default.
- W2321834993 cites W2112288727 @default.
- W2321834993 cites W2116250379 @default.
- W2321834993 cites W2122270852 @default.
- W2321834993 cites W2126362014 @default.
- W2321834993 cites W2127277133 @default.
- W2321834993 cites W2154824307 @default.
- W2321834993 cites W2164751111 @default.
- W2321834993 doi "https://doi.org/10.1021/cm902107h" @default.
- W2321834993 hasPublicationYear "2009" @default.
- W2321834993 type Work @default.
- W2321834993 sameAs 2321834993 @default.
- W2321834993 citedByCount "25" @default.
- W2321834993 countsByYear W23218349932012 @default.
- W2321834993 countsByYear W23218349932013 @default.
- W2321834993 countsByYear W23218349932014 @default.
- W2321834993 countsByYear W23218349932015 @default.
- W2321834993 countsByYear W23218349932016 @default.
- W2321834993 countsByYear W23218349932018 @default.
- W2321834993 countsByYear W23218349932019 @default.
- W2321834993 countsByYear W23218349932020 @default.
- W2321834993 countsByYear W23218349932023 @default.
- W2321834993 crossrefType "journal-article" @default.
- W2321834993 hasAuthorship W2321834993A5002260462 @default.
- W2321834993 hasAuthorship W2321834993A5020625982 @default.
- W2321834993 hasAuthorship W2321834993A5063685864 @default.
- W2321834993 hasAuthorship W2321834993A5065843104 @default.
- W2321834993 hasAuthorship W2321834993A5081647094 @default.
- W2321834993 hasConcept C115537861 @default.
- W2321834993 hasConcept C127413603 @default.
- W2321834993 hasConcept C142724271 @default.
- W2321834993 hasConcept C171250308 @default.
- W2321834993 hasConcept C179104552 @default.
- W2321834993 hasConcept C185592680 @default.
- W2321834993 hasConcept C19067145 @default.
- W2321834993 hasConcept C191897082 @default.
- W2321834993 hasConcept C192562407 @default.
- W2321834993 hasConcept C194760766 @default.
- W2321834993 hasConcept C204787440 @default.
- W2321834993 hasConcept C2776910235 @default.