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- W2322149728 abstract "W-doped Fe2O3 films have been fabricated on polycrystalline alumina substrates by the RF magnetron sputtering method, and effects of annealing temperature on the NO2 sensing properties have been examined. The crystal structure of the obtained film changed from Fe3O4 to α-Fe2O3 after annealing at temperatures of 500 to 500°C in air. An increase in the annealing temperature increased the particle size, resulting in a decrease in the NO2-gas sensitivity. These results suggest that the NO2 sensitivity of W-doped Fe2O3 film depends on the particle size." @default.
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- W2322149728 date "1994-01-01" @default.
- W2322149728 modified "2023-09-24" @default.
- W2322149728 title "Microstructure and NO<sub>2</sub> Sensing Properties of Fe<sub>2</sub>O<sub>3</sub> Thin Films" @default.
- W2322149728 doi "https://doi.org/10.2109/jcersj.102.185" @default.
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