FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2322230250> ?p ?o ?g. }

• W2322230250 endingPage "2949" @default.
• W2322230250 startingPage "2944" @default.
• W2322230250 abstract "In this paper, we propose for the first time an attractive Si <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> /laminated Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> -HfO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> (LAHO) stack metal- insulator-metal (MIM) capacitor with a low-leakage characteristic, good voltage linearity, high capacitance density, and excellent time-dependent dielectric breakdown (TDDB) reliability. The capacitor demonstrates a capacitance density of 4.2 fF/μm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , quadratic voltage coefficients (α) of 106 ppm/V <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , and 18.92-year TDDB lifetime under a stressing voltage of 6.6 V. For the extended performance, it is projected that such a capacitor can possess a maximum capacitance density of 4.13 fF/μm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> with α ≤ 100 ppm/V <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> and TDDB lifetime of 10 years under an analog operation of 7 V. Furthermore, this paper shows that α and TDDB lifetime of the new capacitor are very sensitive to the thickness of the Si <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> film. Comparison of the new MIM capacitors with the SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> /HfO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> stack MIM capacitors shows that the SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> /HfO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> capacitor is more suitable for low-voltage applications, whereas the new Si <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> /LAHO capacitor is superior for operations requiring a higher biasing condition." @default.
• W2322230250 created "2016-06-24" @default.
• W2322230250 creator A5029610297 @default.
• W2322230250 creator A5053201835 @default.
• W2322230250 creator A5054249369 @default.
• W2322230250 creator A5072165758 @default.
• W2322230250 creator A5086094705 @default.
• W2322230250 date "2014-08-01" @default.
• W2322230250 modified "2023-09-27" @default.
• W2322230250 title "A Reliable Si₃N₄/Al₂O₃-HfO₂Stack MIM Capacitor for High-Voltage Analog Applications" @default.
• W2322230250 cites W1520603493 @default.
• W2322230250 cites W1984850493 @default.
• W2322230250 cites W1986092566 @default.
• W2322230250 cites W1999343861 @default.
• W2322230250 cites W2023080050 @default.
• W2322230250 cites W2059578695 @default.
• W2322230250 cites W2061539348 @default.
• W2322230250 cites W2105865834 @default.
• W2322230250 cites W2115824584 @default.
• W2322230250 cites W2124255697 @default.
• W2322230250 cites W2133382261 @default.
• W2322230250 cites W2140940671 @default.
• W2322230250 cites W2148782513 @default.
• W2322230250 doi "https://doi.org/10.1109/ted.2014.2332046" @default.
• W2322230250 hasPublicationYear "2014" @default.
• W2322230250 type Work @default.
• W2322230250 sameAs 2322230250 @default.
• W2322230250 citedByCount "9" @default.
• W2322230250 countsByYear W23222302502016 @default.
• W2322230250 countsByYear W23222302502018 @default.
• W2322230250 countsByYear W23222302502019 @default.
• W2322230250 countsByYear W23222302502020 @default.
• W2322230250 countsByYear W23222302502022 @default.
• W2322230250 countsByYear W23222302502023 @default.
• W2322230250 crossrefType "journal-article" @default.
• W2322230250 hasAuthorship W2322230250A5029610297 @default.
• W2322230250 hasAuthorship W2322230250A5053201835 @default.
• W2322230250 hasAuthorship W2322230250A5054249369 @default.
• W2322230250 hasAuthorship W2322230250A5072165758 @default.
• W2322230250 hasAuthorship W2322230250A5086094705 @default.
• W2322230250 hasConcept C113196181 @default.
• W2322230250 hasConcept C119599485 @default.
• W2322230250 hasConcept C121332964 @default.
• W2322230250 hasConcept C127413603 @default.
• W2322230250 hasConcept C165801399 @default.
• W2322230250 hasConcept C17525397 @default.
• W2322230250 hasConcept C178790620 @default.
• W2322230250 hasConcept C185592680 @default.
• W2322230250 hasConcept C192562407 @default.
• W2322230250 hasConcept C199360897 @default.
• W2322230250 hasConcept C30066665 @default.
• W2322230250 hasConcept C41008148 @default.
• W2322230250 hasConcept C52192207 @default.
• W2322230250 hasConcept C62520636 @default.
• W2322230250 hasConcept C9395851 @default.
• W2322230250 hasConceptScore W2322230250C113196181 @default.
• W2322230250 hasConceptScore W2322230250C119599485 @default.
• W2322230250 hasConceptScore W2322230250C121332964 @default.
• W2322230250 hasConceptScore W2322230250C127413603 @default.
• W2322230250 hasConceptScore W2322230250C165801399 @default.
• W2322230250 hasConceptScore W2322230250C17525397 @default.
• W2322230250 hasConceptScore W2322230250C178790620 @default.
• W2322230250 hasConceptScore W2322230250C185592680 @default.
• W2322230250 hasConceptScore W2322230250C192562407 @default.
• W2322230250 hasConceptScore W2322230250C199360897 @default.
• W2322230250 hasConceptScore W2322230250C30066665 @default.
• W2322230250 hasConceptScore W2322230250C41008148 @default.
• W2322230250 hasConceptScore W2322230250C52192207 @default.
• W2322230250 hasConceptScore W2322230250C62520636 @default.
• W2322230250 hasConceptScore W2322230250C9395851 @default.
• W2322230250 hasIssue "8" @default.
• W2322230250 hasLocation W23222302501 @default.
• W2322230250 hasOpenAccess W2322230250 @default.
• W2322230250 hasPrimaryLocation W23222302501 @default.
• W2322230250 hasRelatedWork W1495357512 @default.
• W2322230250 hasRelatedWork W1990666957 @default.
• W2322230250 hasRelatedWork W2083920390 @default.
• W2322230250 hasRelatedWork W2120716300 @default.
• W2322230250 hasRelatedWork W2121039017 @default.
• W2322230250 hasRelatedWork W2168268987 @default.
• W2322230250 hasRelatedWork W2899084033 @default.
• W2322230250 hasRelatedWork W3021272452 @default.
• W2322230250 hasRelatedWork W3022868411 @default.
• W2322230250 hasRelatedWork W4253731651 @default.
• W2322230250 hasVolume "61" @default.
• W2322230250 isParatext "false" @default.
• W2322230250 isRetracted "false" @default.
• W2322230250 magId "2322230250" @default.
• W2322230250 workType "article" @default.