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- W2322438378 abstract "A newly developed multi-physics simulation tool for MEMS (microelectromechanical systems) has been applied to a branched suspension structure to study the versatility of analysis. More than two suspension modules or actuator modules can be connected to a mass module that solves the equation of motion without modifying the internal equivalent circuit module, thanks to the carefully designed signal handling method, where displacement and velocity are interpreted as voltage while mechanical force as electrical current. A 4-bit microelectromechanical digital-to-analog converter of displacement has been modeled as a verification to reproduce the micromechanical behavior." @default.
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- W2322438378 date "2012-01-01" @default.
- W2322438378 modified "2023-09-29" @default.
- W2322438378 title "An Equivalent Circuit for Equation-of-Motion Solver Applied to Branched Suspension Structures" @default.
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- W2322438378 doi "https://doi.org/10.1541/ieejsmas.132.64" @default.
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