Matches in SemOpenAlex for { <https://semopenalex.org/work/W2323082812> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2323082812 abstract "Silica sol nano-abrasives with large particle are prepared and characterized by TEM, PCS and Zeta potential in this paper. Results show that the silica sol nano-abrasives about 100nm are of higher stability (Zeta potential: −65mV) and narrow distribution of particle size. And then alkali CMP slurries for tungsten containing self-made silica sol nano-abrasives are prepared and applied. CMP results show that the removal rate has been improved to 367nm/min and the RMS of surface roughness has been reduced from 4.4nm to 0.80nm. In sum, one kind of alkali slurry containing 100nm silica sol for tungsten CMP is studied." @default.
- W2323082812 created "2016-06-24" @default.
- W2323082812 creator A5028675439 @default.
- W2323082812 creator A5033043374 @default.
- W2323082812 creator A5039710242 @default.
- W2323082812 date "2005-01-01" @default.
- W2323082812 modified "2023-10-15" @default.
- W2323082812 title "Chemical Mechanical Polishing Slurry for Tungsten in ULSI With Large Particle Size Colloidal Silica Nano-Abrasive" @default.
- W2323082812 cites W1962831448 @default.
- W2323082812 cites W2024959903 @default.
- W2323082812 cites W2032456649 @default.
- W2323082812 cites W2073433607 @default.
- W2323082812 cites W2091989934 @default.
- W2323082812 cites W2100342067 @default.
- W2323082812 doi "https://doi.org/10.1115/wtc2005-64249" @default.
- W2323082812 hasPublicationYear "2005" @default.
- W2323082812 type Work @default.
- W2323082812 sameAs 2323082812 @default.
- W2323082812 citedByCount "0" @default.
- W2323082812 crossrefType "proceedings-article" @default.
- W2323082812 hasAuthorship W2323082812A5028675439 @default.
- W2323082812 hasAuthorship W2323082812A5033043374 @default.
- W2323082812 hasAuthorship W2323082812A5039710242 @default.
- W2323082812 hasConcept C107365816 @default.
- W2323082812 hasConcept C111368507 @default.
- W2323082812 hasConcept C127313418 @default.
- W2323082812 hasConcept C127413603 @default.
- W2323082812 hasConcept C138113353 @default.
- W2323082812 hasConcept C155672457 @default.
- W2323082812 hasConcept C159985019 @default.
- W2323082812 hasConcept C171250308 @default.
- W2323082812 hasConcept C178790620 @default.
- W2323082812 hasConcept C180088628 @default.
- W2323082812 hasConcept C185592680 @default.
- W2323082812 hasConcept C187530423 @default.
- W2323082812 hasConcept C191897082 @default.
- W2323082812 hasConcept C192562407 @default.
- W2323082812 hasConcept C198091228 @default.
- W2323082812 hasConcept C2777581544 @default.
- W2323082812 hasConcept C2778024142 @default.
- W2323082812 hasConcept C2778517922 @default.
- W2323082812 hasConcept C2780357685 @default.
- W2323082812 hasConcept C2780957350 @default.
- W2323082812 hasConcept C2781448156 @default.
- W2323082812 hasConcept C42360764 @default.
- W2323082812 hasConcept C542268612 @default.
- W2323082812 hasConcept C60448018 @default.
- W2323082812 hasConcept C71039073 @default.
- W2323082812 hasConcept C77066764 @default.
- W2323082812 hasConcept C86181022 @default.
- W2323082812 hasConcept C94293008 @default.
- W2323082812 hasConceptScore W2323082812C107365816 @default.
- W2323082812 hasConceptScore W2323082812C111368507 @default.
- W2323082812 hasConceptScore W2323082812C127313418 @default.
- W2323082812 hasConceptScore W2323082812C127413603 @default.
- W2323082812 hasConceptScore W2323082812C138113353 @default.
- W2323082812 hasConceptScore W2323082812C155672457 @default.
- W2323082812 hasConceptScore W2323082812C159985019 @default.
- W2323082812 hasConceptScore W2323082812C171250308 @default.
- W2323082812 hasConceptScore W2323082812C178790620 @default.
- W2323082812 hasConceptScore W2323082812C180088628 @default.
- W2323082812 hasConceptScore W2323082812C185592680 @default.
- W2323082812 hasConceptScore W2323082812C187530423 @default.
- W2323082812 hasConceptScore W2323082812C191897082 @default.
- W2323082812 hasConceptScore W2323082812C192562407 @default.
- W2323082812 hasConceptScore W2323082812C198091228 @default.
- W2323082812 hasConceptScore W2323082812C2777581544 @default.
- W2323082812 hasConceptScore W2323082812C2778024142 @default.
- W2323082812 hasConceptScore W2323082812C2778517922 @default.
- W2323082812 hasConceptScore W2323082812C2780357685 @default.
- W2323082812 hasConceptScore W2323082812C2780957350 @default.
- W2323082812 hasConceptScore W2323082812C2781448156 @default.
- W2323082812 hasConceptScore W2323082812C42360764 @default.
- W2323082812 hasConceptScore W2323082812C542268612 @default.
- W2323082812 hasConceptScore W2323082812C60448018 @default.
- W2323082812 hasConceptScore W2323082812C71039073 @default.
- W2323082812 hasConceptScore W2323082812C77066764 @default.
- W2323082812 hasConceptScore W2323082812C86181022 @default.
- W2323082812 hasConceptScore W2323082812C94293008 @default.
- W2323082812 hasLocation W23230828121 @default.
- W2323082812 hasOpenAccess W2323082812 @default.
- W2323082812 hasPrimaryLocation W23230828121 @default.
- W2323082812 hasRelatedWork W1974780122 @default.
- W2323082812 hasRelatedWork W2074309736 @default.
- W2323082812 hasRelatedWork W2076501399 @default.
- W2323082812 hasRelatedWork W2288121429 @default.
- W2323082812 hasRelatedWork W2323082812 @default.
- W2323082812 hasRelatedWork W2333979735 @default.
- W2323082812 hasRelatedWork W2605290712 @default.
- W2323082812 hasRelatedWork W2921131276 @default.
- W2323082812 hasRelatedWork W3048737581 @default.
- W2323082812 hasRelatedWork W3167916481 @default.
- W2323082812 isParatext "false" @default.
- W2323082812 isRetracted "false" @default.
- W2323082812 magId "2323082812" @default.
- W2323082812 workType "article" @default.