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- W2323731489 abstract "In the 1st report, it has been shown that a newly developed piezoelectric-driven turntable moved by the “inchworm” function is capable of positioning accuracy with less than 4.8×10-7 rad (0.1 arcsec) for a range of π/2. And it also has the following advantages ; (1) operable in a vacuum environment, (2) non-magnetic material construction, (3) small heat generation, (4) compactness. However, there were some problems for practical use, such as the reliability of the piezoelectric actuator and wear of the clamping parts. In the present report, it has been shown that the developed piezoelectric-driven turntable can be used continuously for a long period of time, over 2 000 hrs, by improving the piezoelectric actuator and by appropriate clamp clearance selection." @default.
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- W2323731489 date "1989-01-01" @default.
- W2323731489 modified "2023-09-26" @default.
- W2323731489 title "Piezoelectric-driven Turntable with High Positioning Accuracy (2nd Report)" @default.
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- W2323731489 doi "https://doi.org/10.2493/jjspe.55.2181" @default.
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