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• W2323741572 abstract "Abstract Ultrananocrystalline Diamond (UNCD) Films were deposited by MW-CVD from an Ar/H 2 /CH 4 plasma. The plasma properties were measured in situ by optical emission spectroscopy and mass spectroscopy. The intensity of the C 2 emission line was systematically varied as a key plasma parameter and a correlation with resulting film properties was found." @default.
• W2323741572 created "2016-06-24" @default.
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• W2323741572 date "2011-12-01" @default.
• W2323741572 modified "2023-10-14" @default.
• W2323741572 title "Process Control of CVD Deposition of Nanocrystalline Diamond Films by Plasma Diagnostics" @default.
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• W2323741572 doi "https://doi.org/10.1524/zpch.2011.0184" @default.
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