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- W2324675944 abstract "Este trabalho apresenta o desenvolvimento do controle e automação de um sistema de deposição de filmes finos por pulverização catódica assistida por radio frequência (RFMS) e com magnetrons opostos. Para controlar os sinais das fontes de potência de RF, acopladores de impedância de RF, manômetros absolutos, vacuômetros, bombas de vácuo, válvulas controladoras de gás e válvulas pneumáticas do sistema RFMS foi montada uma interface de hardware e desenvolvido um programa de controle com interface amigável para usuários, através da plataforma computacional LabView da National Instruments. O sistema de controle proposto visa aumentar a reprodutibilidade de filmes finos nanométricos de biomateriais produzidos pelo RFMS. Palavras Chave : RF Magnetron sputtering, Biomateriais, Filmes finos, automação de experimentos, instrumentação científica, LabView. Abstract This work reports the development of a control and automation of an opposing magnetron RF sputtering system (RFMS), as well The hardware and the control software with friendly interface to the users. The controlling program was based in a LabView platform to read and control the RFMS system signals from RF power supplies, automated matching networks, capacitance manometers, vacuum gauges, vacuum pumps, gas valves and pneumatic valves. This work also aims for increasing the efficiency, reproducibility and confidence of nanometer thin films of biomaterials produced by RFMS, through the developed automation and control system. Keywords: RF Magnetron sputtering, Biomaterial, Thin Films, automation, scientific instrumentation, LabView." @default.
- W2324675944 created "2016-06-24" @default.
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- W2324675944 date "2014-04-01" @default.
- W2324675944 modified "2023-10-16" @default.
- W2324675944 title "Control and automation of an Opposing Magnetron RF Sputtering system to produce nanometric thin films" @default.
- W2324675944 doi "https://doi.org/10.7437/nt2236-7640/2014.04.001" @default.
- W2324675944 hasPublicationYear "2014" @default.
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