Matches in SemOpenAlex for { <https://semopenalex.org/work/W2325003969> ?p ?o ?g. }
- W2325003969 endingPage "5871" @default.
- W2325003969 startingPage "5862" @default.
- W2325003969 abstract "Combined in situ IR measurements and first-principles calculations of InP(100) surfaces reveal that mild annealing (∼300 °C), typically needed for atomic layer deposition, leads to the formation of InP-derived surface hydrophosphate species (both P═O and P–OH sites). The initial interaction of trimethylaluminum at 300 °C results in the formation of P–O–Al linkages through covalent and dative bonding by reaction with surface hydroxyls. During subsequent ALD cycles to deposit Al2O3, an interfacial layer composed of P–O–Al bonds (1140 cm–1) is formed, requiring approximately seven cycles for completion. Similar chemical transformations are observed on hydrofluoric acid and ammonium-sulfide treated [HF/(NH4)2S] surfaces but to a lesser degree since the oxide thickness is reduced, requiring only approximately three cycles to fully complete the interfacial layer. Initially, the ALD growth of Al2O3 is slower on the HF/(NH4)2S-treated InP(100) surface than on the native oxide surface due to a lower density of hydroxyl groups. However, this slow growth leads to a denser film, highlighting the importance of the chemical composition of the initial InP(100) substrate." @default.
- W2325003969 created "2016-06-24" @default.
- W2325003969 creator A5000577448 @default.
- W2325003969 creator A5023005037 @default.
- W2325003969 creator A5051239060 @default.
- W2325003969 creator A5051841734 @default.
- W2325003969 date "2014-03-06" @default.
- W2325003969 modified "2023-10-18" @default.
- W2325003969 title "Surface Oxide Characterization and Interface Evolution in Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> on InP(100) Studied by in Situ Infrared Spectroscopy" @default.
- W2325003969 cites W1510666470 @default.
- W2325003969 cites W1514556824 @default.
- W2325003969 cites W1553528435 @default.
- W2325003969 cites W1562207100 @default.
- W2325003969 cites W1562615082 @default.
- W2325003969 cites W1570618996 @default.
- W2325003969 cites W1638132286 @default.
- W2325003969 cites W1642436573 @default.
- W2325003969 cites W1869317610 @default.
- W2325003969 cites W1966182479 @default.
- W2325003969 cites W1973092964 @default.
- W2325003969 cites W1980340456 @default.
- W2325003969 cites W1984288122 @default.
- W2325003969 cites W1984772856 @default.
- W2325003969 cites W1985774708 @default.
- W2325003969 cites W1988302414 @default.
- W2325003969 cites W1991579873 @default.
- W2325003969 cites W1993243846 @default.
- W2325003969 cites W1995191254 @default.
- W2325003969 cites W1995836054 @default.
- W2325003969 cites W1998826699 @default.
- W2325003969 cites W2000815209 @default.
- W2325003969 cites W2000900802 @default.
- W2325003969 cites W2000923548 @default.
- W2325003969 cites W2000969759 @default.
- W2325003969 cites W2006899770 @default.
- W2325003969 cites W2010126428 @default.
- W2325003969 cites W2011780924 @default.
- W2325003969 cites W2013572589 @default.
- W2325003969 cites W2015365638 @default.
- W2325003969 cites W2019151726 @default.
- W2325003969 cites W2019799289 @default.
- W2325003969 cites W2020794129 @default.
- W2325003969 cites W2021829259 @default.
- W2325003969 cites W2027178519 @default.
- W2325003969 cites W2031157972 @default.
- W2325003969 cites W2035968367 @default.
- W2325003969 cites W2036373914 @default.
- W2325003969 cites W2040050934 @default.
- W2325003969 cites W2040719759 @default.
- W2325003969 cites W2042030957 @default.
- W2325003969 cites W2042928262 @default.
- W2325003969 cites W2045888095 @default.
- W2325003969 cites W2047384681 @default.
- W2325003969 cites W2054704030 @default.
- W2325003969 cites W2055625120 @default.
- W2325003969 cites W2060451011 @default.
- W2325003969 cites W2078199884 @default.
- W2325003969 cites W2083119575 @default.
- W2325003969 cites W2083322519 @default.
- W2325003969 cites W2087532750 @default.
- W2325003969 cites W2091417196 @default.
- W2325003969 cites W2093196984 @default.
- W2325003969 cites W2094708577 @default.
- W2325003969 cites W2105042971 @default.
- W2325003969 cites W2171645445 @default.
- W2325003969 cites W2312442540 @default.
- W2325003969 cites W2316692596 @default.
- W2325003969 cites W2322939637 @default.
- W2325003969 cites W2329719417 @default.
- W2325003969 cites W4380136614 @default.
- W2325003969 doi "https://doi.org/10.1021/jp412455y" @default.
- W2325003969 hasPublicationYear "2014" @default.
- W2325003969 type Work @default.
- W2325003969 sameAs 2325003969 @default.
- W2325003969 citedByCount "13" @default.
- W2325003969 countsByYear W23250039692014 @default.
- W2325003969 countsByYear W23250039692015 @default.
- W2325003969 countsByYear W23250039692018 @default.
- W2325003969 countsByYear W23250039692019 @default.
- W2325003969 countsByYear W23250039692020 @default.
- W2325003969 countsByYear W23250039692022 @default.
- W2325003969 countsByYear W23250039692023 @default.
- W2325003969 crossrefType "journal-article" @default.
- W2325003969 hasAuthorship W2325003969A5000577448 @default.
- W2325003969 hasAuthorship W2325003969A5023005037 @default.
- W2325003969 hasAuthorship W2325003969A5051239060 @default.
- W2325003969 hasAuthorship W2325003969A5051841734 @default.
- W2325003969 hasConcept C113196181 @default.
- W2325003969 hasConcept C153642686 @default.
- W2325003969 hasConcept C171250308 @default.
- W2325003969 hasConcept C178213299 @default.
- W2325003969 hasConcept C178790620 @default.
- W2325003969 hasConcept C179104552 @default.
- W2325003969 hasConcept C18293161 @default.
- W2325003969 hasConcept C185592680 @default.
- W2325003969 hasConcept C19067145 @default.
- W2325003969 hasConcept C191897082 @default.
- W2325003969 hasConcept C192562407 @default.